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Patents Grants
last 30 patents
Information
Patent Grant
System and method for transferring a focus ring into processing app...
Patent number
11,869,752
Issue date
Jan 9, 2024
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for inspecting processing apparatus
Patent number
11,817,335
Issue date
Nov 14, 2023
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measurement method and measurement apparatus
Patent number
11,735,402
Issue date
Aug 22, 2023
Tokyo Electron Limited
Takashi Kubo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Calibration method and calibration system
Patent number
11,604,097
Issue date
Mar 14, 2023
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ranging apparatus and method using the ranging apparatus
Patent number
11,513,194
Issue date
Nov 29, 2022
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transfer method and transfer system
Patent number
11,380,568
Issue date
Jul 5, 2022
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measuring device and operation method of system for inspecting focu...
Patent number
11,164,729
Issue date
Nov 2, 2021
Tokyo Electron Limited
Kippei Sugita
G01 - MEASURING TESTING
Information
Patent Grant
Transfer robot system, teaching method and wafer receptacle
Patent number
10,964,575
Issue date
Mar 30, 2021
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measuring device and method for obtaining amount of deviation of me...
Patent number
10,948,317
Issue date
Mar 16, 2021
Tokyo Electron Limited
Kippei Sugita
G01 - MEASURING TESTING
Information
Patent Grant
Method of obtaining amount of deviation of a measuring device, and...
Patent number
10,903,100
Issue date
Jan 26, 2021
Tokyo Electron Limited
Kippei Sugita
G01 - MEASURING TESTING
Information
Patent Grant
Transfer method and transfer system
Patent number
10,861,729
Issue date
Dec 8, 2020
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for calibrating measuring device and case used in the calibr...
Patent number
10,837,810
Issue date
Nov 17, 2020
Tokyo Electron Limited
Kippei Sugita
G01 - MEASURING TESTING
Information
Patent Grant
Electrostatic capacitance measuring device
Patent number
10,837,991
Issue date
Nov 17, 2020
Tokyo Electron Limited
Kippei Sugita
G01 - MEASURING TESTING
Information
Patent Grant
Measuring instrument for measuring electrostatic capacity and metho...
Patent number
10,634,479
Issue date
Apr 28, 2020
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Position detection system and processing apparatus
Patent number
10,354,896
Issue date
Jul 16, 2019
Tokyo Electron Limited
Kippei Sugita
G01 - MEASURING TESTING
Information
Patent Grant
Position detecting system and processing apparatus
Patent number
10,199,251
Issue date
Feb 5, 2019
Tokyo Electron Limited
Kippei Sugita
G01 - MEASURING TESTING
Information
Patent Grant
Method for acquiring data indicating electrostatic capacitance
Patent number
10,074,549
Issue date
Sep 11, 2018
Tokyo Electron Limited
Kippei Sugita
G01 - MEASURING TESTING
Information
Patent Grant
Sensor chip for electrostatic capacitance measurement and measuring...
Patent number
10,018,484
Issue date
Jul 10, 2018
Tokyo Electron Limited
Kippei Sugita
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Sensor chip for electrostatic capacitance measurement and measuring...
Patent number
9,903,739
Issue date
Feb 27, 2018
Tokyo Electron Limited
Kippei Sugita
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System of inspecting focus ring and method of inspecting focus ring
Patent number
9,841,395
Issue date
Dec 12, 2017
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for improving chemical resistance of polymerized film, polym...
Patent number
9,708,507
Issue date
Jul 18, 2017
Tokyo Electron Limited
Kippei Sugita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for depositing a film and film deposition apparatus
Patent number
9,349,584
Issue date
May 24, 2016
Tokyo Electron Limited
Kippei Sugita
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Film forming apparatus
Patent number
9,163,311
Issue date
Oct 20, 2015
Tokyo Electron Limited
Harunari Hasegawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus
Patent number
9,127,358
Issue date
Sep 8, 2015
Tokyo Electron Limited
Mitsuya Inoue
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
8,716,130
Issue date
May 6, 2014
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MEASUREMENT METHOD AND MEASUREMENT APPARATUS
Publication number
20220406579
Publication date
Dec 22, 2022
TOKYO ELECTRON LIMITED
Takashi KUBO
G01 - MEASURING TESTING
Information
Patent Application
CALIBRATION APPARATUS AND CALIBRATION METHOD
Publication number
20220341844
Publication date
Oct 27, 2022
TOKYO ELECTRON LIMITED
Yuto USUKI
G01 - MEASURING TESTING
Information
Patent Application
EXECUTION DEVICE AND EXECUTION METHOD
Publication number
20210391195
Publication date
Dec 16, 2021
TOKYO ELECTRON LIMITED
Kippei SUGITA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CALIBRATION METHOD AND CALIBRATION SYSTEM
Publication number
20210356324
Publication date
Nov 18, 2021
TOKYO ELECTRON LIMITED
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSFER SYSTEM AND TRANSFER METHOD
Publication number
20210183628
Publication date
Jun 17, 2021
TOKYO ELECTRON LIMITED
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
JIG, PROCESSING SYSTEM AND PROCESSING METHOD
Publication number
20210166960
Publication date
Jun 3, 2021
TOKYO ELECTRON LIMITED
Kippei SUGITA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND SYSTEM FOR INSPECTING PROCESSING APPARATUS
Publication number
20210074564
Publication date
Mar 11, 2021
TOKYO ELECTRON LIMITED
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSFER METHOD AND TRANSFER SYSTEM
Publication number
20210057252
Publication date
Feb 25, 2021
TOKYO ELECTRON LIMITED
Kippei SUGITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSFER METHOD AND TRANSFER SYSTEM
Publication number
20200194295
Publication date
Jun 18, 2020
TOKYO ELECTRON LIMITED
Kippei SUGITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSFER ROBOT SYSTEM, TEACHING METHOD AND WAFER RECEPTACLE
Publication number
20200161154
Publication date
May 21, 2020
TOKYO ELECTRON LIMITED
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RANGING APPARATUS AND METHOD USING THE RANGING APPARATUS
Publication number
20200025884
Publication date
Jan 23, 2020
TOKYO ELECTRON LIMITED
Kippei Sugita
G01 - MEASURING TESTING
Information
Patent Application
MEASURING DEVICE AND METHOD FOR OBTAINING AMOUNT OF DEVIATION OF ME...
Publication number
20190277665
Publication date
Sep 12, 2019
TOKYO ELECTRON LIMITED
Kippei SUGITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEASURING DEVICE AND OPERATION METHOD OF SYSTEM FOR INSPECTING FOCU...
Publication number
20190279848
Publication date
Sep 12, 2019
TOKYO ELECTRON LIMITED
Kippei SUGITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF OBTAINING AMOUNT OF DEVIATION OF A MEASURING DEVICE, AND...
Publication number
20190164791
Publication date
May 30, 2019
TOKYO ELECTRON LIMITED
Kippei SUGITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CALIBRATING MEASURING DEVICE AND CASE USED IN THE CALIBR...
Publication number
20190033103
Publication date
Jan 31, 2019
TOKYO ELECTRON LIMITED
Kippei SUGITA
G01 - MEASURING TESTING
Information
Patent Application
POSITION DETECTING SYSTEM AND PROCESSING APPARATUS
Publication number
20180301322
Publication date
Oct 18, 2018
TOKYO ELECTRON LIMITED
Kippei SUGITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CAPACITANCE MEASURING DEVICE
Publication number
20180284171
Publication date
Oct 4, 2018
TOKYO ELECTRON LIMITED
Kippei SUGITA
G01 - MEASURING TESTING
Information
Patent Application
SENSOR CHIP FOR ELECTROSTATIC CAPACITANCE MEASUREMENT AND MEASURING...
Publication number
20180136013
Publication date
May 17, 2018
TOKYO ELECTRON LIMITED
Kippei Sugita
G01 - MEASURING TESTING
Information
Patent Application
POSITION DETECTION SYSTEM AND PROCESSING APPARATUS
Publication number
20180090354
Publication date
Mar 29, 2018
TOKYO ELECTRON LIMITED
Kippei SUGITA
G01 - MEASURING TESTING
Information
Patent Application
MEASURING INSTRUMENT FOR MEASURING ELECTROSTATIC CAPACITY AND METHO...
Publication number
20170363407
Publication date
Dec 21, 2017
TOKYO ELECTRON LIMITED
Kippei SUGITA
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR ACQUIRING DATA INDICATING ELECTROSTATIC CAPACITANCE
Publication number
20170278735
Publication date
Sep 28, 2017
TOKYO ELECTRON LIMITED
Kippei SUGITA
G01 - MEASURING TESTING
Information
Patent Application
SENSOR CHIP FOR ELECTROSTATIC CAPACITANCE MEASUREMENT AND MEASURING...
Publication number
20160363433
Publication date
Dec 15, 2016
TOKYO ELECTRON LIMITED
Kippei Sugita
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM OF INSPECTING FOCUS RING AND METHOD OF INSPECTING FOCUS RING
Publication number
20160363556
Publication date
Dec 15, 2016
TOKYO ELECTRON LIMITED
Kippei Sugita
G01 - MEASURING TESTING
Information
Patent Application
Method for Manufacturing Hollow Structure
Publication number
20160280536
Publication date
Sep 29, 2016
TOKYO ELECTRON LIMITED
Kippei SUGITA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Improving Chemical Resistance of Polymerized Film, Polym...
Publication number
20150240121
Publication date
Aug 27, 2015
TOKYO ELECTRON LIMITED
Kippei SUGITA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR DEPOSITING A FILM AND FILM DEPOSITION APPARATUS
Publication number
20150087158
Publication date
Mar 26, 2015
TOKYO ELECTRON LIMITED
Kippei Sugita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20130089983
Publication date
Apr 11, 2013
TOKYO ELECTRON LIMITED
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD AND FILM DEPOSITING METHOD
Publication number
20120269970
Publication date
Oct 25, 2012
TOKYO ELECTRON LIMITED
Yasuyuki IDO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20120180719
Publication date
Jul 19, 2012
TOKYO ELECTRON LIMITED
Mitsuya INOUE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20120180727
Publication date
Jul 19, 2012
TOKYO ELECTRON LIMITED
Harunari HASEGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...