Kirill Y. Sobolev

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Bethel, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Sensor apparatus and method for lithographic measurements
- Patent number 11,526,091
- Issue date Dec 13, 2022
- ASML Holding N.V.
- Tamer Mohamed Tawfik Ahmed Mohamed Elazhary
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Objective lens system
- Patent number 10,247,940
- Issue date Apr 2, 2019
- ASML Holding N.V.
- Kirill Urievich Sobolev
- G01 - MEASURING TESTING
Information Patent Grant
Optical system and method for illumination of reflective spatial li...
- Patent number 7,965,378
- Issue date Jun 21, 2011
- ASML Holding N.V.
- Stanislav Y. Smirnov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR REGION OF INTEREST PROCESSING FOR RETICLE PARTICLE DETEC...
- Publication number 20230055116
- Publication date Feb 23, 2023
- ASML Holding N.V.
- Peter Conrad KOCHERSPERGER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SENSOR APPARATUS AND METHOD FOR LITHOGRAPHIC MEASUREMENTS
- Publication number 20220179331
- Publication date Jun 9, 2022
- ASML Holding N.V.
- Tamer Mohamed Tawfik Ahmed Mohamed ELAZHARY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR AND METHOD OF SIMULTANEOUSLY ACQUIRING PARALLEL ALIGN...
- Publication number 20220100109
- Publication date Mar 31, 2022
- ASML Holding N.V.
- Tamer Mohamed Tawfik Ahmed Mohamed ELAZHARY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECTIVE LENS SYSTEM
- Publication number 20180341105
- Publication date Nov 29, 2018
- ASML Holding N.V.
- Kirill Urievich SOBOLEV
- G01 - MEASURING TESTING
Information Patent Application
Optical system and method for illuimination of reflective spatial l...
- Publication number 20080198354
- Publication date Aug 21, 2008
- Stanislav Y. Smirnov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY