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Wafer enclosure with door
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Patent number 5,957,292
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Issue date Sep 28, 1999
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Fluoroware, Inc.
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Kirk J. Mikkelsen
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer carrier
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Patent number 5,780,127
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Issue date Jul 14, 1998
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Flouroware, Inc.
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Kirk J. Mikkelsen
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H01 - BASIC ELECTRIC ELEMENTS
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Evacuated wafer container
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Patent number 5,255,783
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Issue date Oct 26, 1993
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Fluoroware, Inc.
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John B. Goodman
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H01 - BASIC ELECTRIC ELEMENTS