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  • San Jose, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Electron beam inspection system and method
    • Patent number 5,502,306
    • Issue date Mar 26, 1996
    • KLA Instruments Corporation
    • Dan Meisburger
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Induction plasma source
    • Patent number 5,346,578
    • Issue date Sep 13, 1994
    • Novellus Systems, Inc.
    • Jeffrey C. Benzing
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents