Membership
Tour
Register
Log in
Kirthi Kattige
Follow
Person
Portland, OR, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Plasma activated conformal dielectric film deposition
Patent number
10,043,655
Issue date
Aug 7, 2018
Novellus Systems, Inc.
Shankar Swaminathan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma activated conformal dielectric film deposition
Patent number
9,570,274
Issue date
Feb 14, 2017
Novellus Systems, Inc.
Shankar Swaminathan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma activated conformal dielectric film deposition
Patent number
8,999,859
Issue date
Apr 7, 2015
Novellus Systems, Inc.
Shankar Swaminathan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma activated conformal dielectric film deposition
Patent number
8,637,411
Issue date
Jan 28, 2014
Novellus Systems, Inc.
Shankar Swaminathan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION
Publication number
20170148628
Publication date
May 25, 2017
Novellus Systems, Inc.
Shankar Swaminathan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION
Publication number
20150206719
Publication date
Jul 23, 2015
Novellus Systems, Inc.
Shankar Swaminathan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION
Publication number
20140216337
Publication date
Aug 7, 2014
Novellus Systems, Inc.
Shankar Swaminathan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION
Publication number
20120028454
Publication date
Feb 2, 2012
Shankar Swaminathan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...