Kirubanandan Naina Shanmugam

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Bangalore, IN

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Patents Grantslast 30 patents

Information Patent Grant
Atomic layer deposition part coating chamber
- Patent number 12,074,010
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Michael R. Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor chamber component cleaning systems
- Patent number 11,848,218
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Katty Guyomard
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20240420926
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION COATING SYSTEM FOR INNER WALLS OF GAS LINES
- Publication number 20240117491
- Publication date Apr 11, 2024
- Hanish Kumar PANAVALAPPIL KUMARANKUTTY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20240093367
- Publication date Mar 21, 2024
- Sriharsha DHARMAPURA SATHYANARAYANAMURTHY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED LID FOR A PROCESS CHAMBER
- Publication number 20230073150
- Publication date Mar 9, 2023
- Shivaprakash Padadayya HIREMATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20230074149
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Michael R. RICE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR CHAMBER COMPONENT CLEANING SYSTEMS
- Publication number 20220130692
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Katty Guyomard
- H01 - BASIC ELECTRIC ELEMENTS