Kiwamu ITO

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma generating apparatus, plasma processing apparatus, and plasm...
- Patent number 12,131,889
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Takeshi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,694,890
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Kiwamu Ito
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INFORMATION PROCESSING APPARATUS AND PARAMETER CONTROL METHOD
- Publication number 20240087925
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Youngtai KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD
- Publication number 20230335394
- Publication date Oct 19, 2023
- TOKYO ELECTRON LIMITED
- Kiwamu ITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD AND PROCESSING APPARATUS
- Publication number 20230326742
- Publication date Oct 12, 2023
- TOKYO ELECTRON LIMITED
- Kiwamu ITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING FILM AND PROCESSING APPARATUS
- Publication number 20220238335
- Publication date Jul 28, 2022
- TOKYO ELECTRON LIMITED
- Takeshi OYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATING APPARATUS, PLASMA PROCESSING APPARATUS, AND PLASM...
- Publication number 20220122812
- Publication date Apr 21, 2022
- TOKYO ELECTRON LIMITED
- Takeshi KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20200312654
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Kiwamu ITO
- H01 - BASIC ELECTRIC ELEMENTS