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Kiwamu Takehisa
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Patents Grants
last 30 patents
Information
Patent Grant
Mask inspection apparatus, switching method, and mask inspection me...
Patent number
10,801,967
Issue date
Oct 13, 2020
Lasertec Corporation
Tetsuya Sendoda
G01 - MEASURING TESTING
Information
Patent Grant
Correction method, correction apparatus, and inspection apparatus
Patent number
10,706,527
Issue date
Jul 7, 2020
Lasertec Corporation
Tsunehito Kohyama
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection apparatus of EUV mask and its focus adjustment method
Patent number
10,319,088
Issue date
Jun 11, 2019
Lasertec Corporation
Hiroki Miyai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Mask inspection apparatus and mask inspection method
Patent number
10,156,664
Issue date
Dec 18, 2018
Lasertec Corporation
Kiwamu Takehisa
B08 - CLEANING
Information
Patent Grant
Laser light source device and inspection device
Patent number
9,991,670
Issue date
Jun 5, 2018
Lasertec Corporation
Kiwamu Takehisa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Interferometer and phase shift amount measuring apparatus with diff...
Patent number
9,719,859
Issue date
Aug 1, 2017
LASERTEC CORPORATION
Haruhiko Kusunose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pellicle inspection apparatus
Patent number
9,588,421
Issue date
Mar 7, 2017
Lasertec Corporation
Kiwamu Takehisa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pulsed iodine laser apparatus
Patent number
9,583,908
Issue date
Feb 28, 2017
Kiwamu Takehisa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser processing method and laser processing system
Patent number
9,350,137
Issue date
May 24, 2016
Kiwamu Takehisa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Oxygen laser oscillator
Patent number
9,209,594
Issue date
Dec 8, 2015
Kiwamu Takehisa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Oxygen laser oscillator
Patent number
9,142,934
Issue date
Sep 22, 2015
Kiwamu Takehisa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid crystal display and light guide plate
Patent number
8,130,340
Issue date
Mar 6, 2012
TOHOKU UNIVERSITY
Tadahiro Ohmi
G02 - OPTICS
Information
Patent Grant
Photomask inspection apparatus
Patent number
7,796,343
Issue date
Sep 14, 2010
Lasertec Corporation
Kiwamu Takehisa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Backlight unit for liquid crystal display
Patent number
7,787,076
Issue date
Aug 31, 2010
Tohoku University
Tadahiro Ohmi
G02 - OPTICS
Information
Patent Grant
Illumination apparatus and illumination method
Patent number
7,764,414
Issue date
Jul 27, 2010
Lasertec Corporation
Haruhiko Kusunose
G02 - OPTICS
Information
Patent Grant
Pattern writing system and pattern writing method
Patent number
7,663,734
Issue date
Feb 16, 2010
Tadahiro Ohmi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask making method, mask making device, and mask drawing device
Patent number
7,474,383
Issue date
Jan 6, 2009
Tadahiro Ohmi
Tadahiro Ohmi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Oscillation method and device of fluorine molecular laser
Patent number
7,099,365
Issue date
Aug 29, 2006
Komatsu, Ltd.
Kiwamu Takehisa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra-narrow band flourine laser apparatus
Patent number
6,839,373
Issue date
Jan 4, 2005
Komatsu Ltd.
Kiwamu Takehisa
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arf excimer laser device, scanning type exposure device and ultravi...
Patent number
6,819,699
Issue date
Nov 16, 2004
Komatsu Ltd.
Tatsuo Enami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wavelength detection device for line-narrowed laser apparatus and u...
Patent number
6,628,682
Issue date
Sep 30, 2003
Komatsu Ltd.
Kiwamu Takehisa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra narrow band fluorine laser apparatus and fluorine exposure ap...
Patent number
6,594,291
Issue date
Jul 15, 2003
Komatsu Ltd.
Kiwamu Takehisa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluorine laser device
Patent number
6,560,269
Issue date
May 6, 2003
Komatsu, Ltd.
Kiwamu Takehisa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-power solid-state laser resonator
Patent number
5,381,437
Issue date
Jan 10, 1995
Hitachi, Ltd.
Kouji Kuwabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for generation of singlet-delta oxygen
Patent number
4,643,889
Issue date
Feb 17, 1987
Mitsui Grinding Wheel Co., Ltd.
Taro Uchiyama
C01 - INORGANIC CHEMISTRY
Patents Applications
last 30 patents
Information
Patent Application
NEAR-INFRARED SPOT LIGHT SOURCE AND CANCER TREATMENT SYSTEM
Publication number
20240366956
Publication date
Nov 7, 2024
Kiwamu TAKEHISA
Kiwamu TAKEHISA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
Publication number
20210247323
Publication date
Aug 12, 2021
Lasertec Corporation
Kiwamu TAKEHISA
G01 - MEASURING TESTING
Information
Patent Application
MASK INSPECTION APPARATUS, SWITCHING METHOD, AND MASK INSPECTION ME...
Publication number
20200182803
Publication date
Jun 11, 2020
Lasertec Corporation
Tetsuya SENDODA
G01 - MEASURING TESTING
Information
Patent Application
CORRECTION METHOD, CORRECTION APPARATUS, AND INSPECTION APPARATUS
Publication number
20180276812
Publication date
Sep 27, 2018
Lasertec Corporation
Tsunehito KOHYAMA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM
Publication number
20180250768
Publication date
Sep 6, 2018
Kiwamu TAKEHISA
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER DEFENSE SYSTEM AND HIGH ALTITUDE AIRSHIP
Publication number
20180252504
Publication date
Sep 6, 2018
Kiwamu TAKEHISA
B64 - AIRCRAFT AVIATION COSMONAUTICS
Information
Patent Application
INSPECTION APPARATUS AND ITS FOCUS ADJUSTMENT METHOD
Publication number
20170256045
Publication date
Sep 7, 2017
Lasertec Corporation
Hiroki Miyai
G01 - MEASURING TESTING
Information
Patent Application
MASK INSPECTION APPARATUS AND MASK INSPECTION METHOD
Publication number
20170235031
Publication date
Aug 17, 2017
Lasertec Corporation
Kiwamu TAKEHISA
B08 - CLEANING
Information
Patent Application
PULSED IODINE LASER APPARATUS
Publication number
20160365695
Publication date
Dec 15, 2016
Kiwamu Takehisa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PELLICLE INSPECTION APPARATUS
Publication number
20150293460
Publication date
Oct 15, 2015
Lasertec Corporation
Kiwamu TAKEHISA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LASER LIGHT SOURCE DEVICE AND INSPECTION DEVICE
Publication number
20150244142
Publication date
Aug 27, 2015
Lasertec Corporation
Kiwamu TAKEHISA
G02 - OPTICS
Information
Patent Application
OXYGEN LASER OSCILLATOR
Publication number
20150214694
Publication date
Jul 30, 2015
Kiwamu Takehisa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERFEROMETER AND PHASE SHIFT AMOUNT MEASURING APPARATUS
Publication number
20150204729
Publication date
Jul 23, 2015
Lasertec Corporation
Haruhiko KUSUNOSE
G01 - MEASURING TESTING
Information
Patent Application
OXYGEN LASER OSCILLATOR
Publication number
20150171591
Publication date
Jun 18, 2015
Kiwamu Takehisa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SHIELD DEVICE AND PLASMA SOURCE APPARATUS
Publication number
20130234597
Publication date
Sep 12, 2013
Lasertec Corporation
Haruhiko KUSUNOSE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Backlight Unit for Liquid Crystal Display
Publication number
20090231514
Publication date
Sep 17, 2009
TOHOKU UNIVERSITY
Tadahiro Ohmi
G02 - OPTICS
Information
Patent Application
PHOTOMASK INSPECTION APPARATUS
Publication number
20090168191
Publication date
Jul 2, 2009
Lasertec Corporation
Kiwamu Takehisa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Liquid crystal display and light guide plate
Publication number
20090103009
Publication date
Apr 23, 2009
TOHOKU UNIVERSITY
Tadahiro Ohmi
G02 - OPTICS
Information
Patent Application
Solar Cell Panel
Publication number
20080302406
Publication date
Dec 11, 2008
TOHOKU UNIVERSITY
Tadahiro Ohmi
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
ILLUMINATION APPARATUS AND ILLUMINATION METHOD
Publication number
20080144148
Publication date
Jun 19, 2008
Lasertec Corporation
Haruhiko Kusunose
G02 - OPTICS
Information
Patent Application
Exposure Apparatus
Publication number
20070207601
Publication date
Sep 6, 2007
Tohoku University
Tadahiro Ohmi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Electron beam exposure device and exposure method
Publication number
20060252160
Publication date
Nov 9, 2006
Tadahiro OHMI
Tadahiro Ohmi
B82 - NANO-TECHNOLOGY
Information
Patent Application
Exposure apparatus for liquid crystal panel and exposure apparatus
Publication number
20060176454
Publication date
Aug 10, 2006
Tadahiro Ohmi
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Application
Pattern plotting device and pattern plotting method
Publication number
20060147841
Publication date
Jul 6, 2006
Tadahiro OHMI Ball Semiconductor Inc.
Tadahiro Ohmi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask making method, mask making device, and mask drawing device
Publication number
20060132591
Publication date
Jun 22, 2006
TADAHIRO OHMI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask repeater and mask manufacturing method
Publication number
20060104413
Publication date
May 18, 2006
Tadahiro OHMI
Tadahiro Ohmi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Oscillation method and device of fluorine molecular laser
Publication number
20030081643
Publication date
May 1, 2003
Kiwamu Takehisa
H01 - BASIC ELECTRIC ELEMENTS