Kiyoaki YAMADA

Person

  • Toyama-shi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    End effector for handling wafers

    • Patent number D997892
    • Issue date Sep 5, 2023
    • Kokusai Electric Corporation
    • Satoshi Aizawa
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Reaction tube structure and substrate processing apparatus

    • Patent number 11,359,283
    • Issue date Jun 14, 2022
    • Kokusai Electric Corporation
    • Tetsuya Marubayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents