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Kiyoaki YAMADA
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Toyama-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
End effector for handling wafers
Patent number
D997892
Issue date
Sep 5, 2023
Kokusai Electric Corporation
Satoshi Aizawa
D13 - Equipment for production, distribution, or transformation of energy
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Patent Grant
Reaction tube structure and substrate processing apparatus
Patent number
11,359,283
Issue date
Jun 14, 2022
Kokusai Electric Corporation
Tetsuya Marubayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
REACTION TUBE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20180142353
Publication date
May 24, 2018
Hitachi Kokusai Electric Inc.
Tetsuya MARUBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...