Kiyofumi Nishii

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate heat treatment apparatus
- Patent number 5,611,685
- Issue date Mar 18, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Toshihiro Nakajima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for heat processing a substrate
- Patent number 5,405,446
- Issue date Apr 11, 1995
- Dainippon Screen Mfg. Co., Ltd.
- Toshihiro Nakajima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for heat-treating wafer by light-irradiation and device f...
- Patent number 5,315,092
- Issue date May 24, 1994
- Dainippon Screen Mfg. Co., Ltd.
- Mitsukazu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS