Kiyohiko Gokon

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Oshu-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Housing and substrate processing apparatus including the same
- Patent number 10,134,578
- Issue date Nov 20, 2018
- Tokyo Electron Limited
- Kiyohiko Gokon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma process method
- Patent number 9,447,926
- Issue date Sep 20, 2016
- Tokyo Electron Limited
- Naomi Onodera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma process apparatus and plasma process method
- Patent number 8,683,943
- Issue date Apr 1, 2014
- Tokyo Electron Limited
- Naomi Onodera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230253221
- Publication date Aug 10, 2023
- TOKYO ELECTRON LIMITED
- Masato KADOBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230253230
- Publication date Aug 10, 2023
- TOKYO ELECTRON LIMITED
- Masato KADOBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESS APPARATUS AND PLASMA PROCESS METHOD
- Publication number 20140150882
- Publication date Jun 5, 2014
- TOKYO ELECTRON LIMITED
- Naomi ONODERA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOUSING AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20130319332
- Publication date Dec 5, 2013
- TOKYO ELECTRON LIMITED
- Kiyohiko GOKON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESS APPARATUS AND PLASMA PROCESS METHOD
- Publication number 20100278999
- Publication date Nov 4, 2010
- TOKYO ELECTRON LIMITED
- Naomi Onodera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...