Kiyohiro Matsushita

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for hydrophobization of surface of silicon-containing film b...
- Patent number 9,478,414
- Issue date Oct 25, 2016
- ASM IP Holding B.V.
- Akiko Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming SiOCH film using organoaminosilane annealing
- Patent number 9,190,263
- Issue date Nov 17, 2015
- ASM IP Holding B.V.
- Dai Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for restoring porous surface of dielectric layer by UV light...
- Patent number 9,136,108
- Issue date Sep 15, 2015
- ASM IP Holding B.V.
- Kiyohiro Matsushita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for treating SiOCH film with hydrogen plasma
- Patent number 9,029,272
- Issue date May 12, 2015
- ASM IP Holding B.V.
- Akinori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for repairing damage of dielectric film by cyclic processes
- Patent number 8,785,215
- Issue date Jul 22, 2014
- ASM IP Holding B.V.
- Akiko Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for supplying gas with flow rate gradient over substrate
- Patent number 8,664,627
- Issue date Mar 4, 2014
- ASM IP Holding B.V.
- Dai Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming interconnect structure having airgap
- Patent number 8,241,991
- Issue date Aug 14, 2012
- ASM Japan K.K.
- Julian J. Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming dielectric SiOCH film having chemical stability
- Patent number 7,807,566
- Issue date Oct 5, 2010
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning UV irradiation chamber
- Patent number 7,789,965
- Issue date Sep 7, 2010
- ASM Japan K.K.
- Kiyohiro Matsushita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
UV light irradiating apparatus with liquid filter
- Patent number 7,763,869
- Issue date Jul 27, 2010
- ASM Japan K.K.
- Kiyohiro Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming silicon-containing insulation film having low die...
- Patent number 7,718,544
- Issue date May 18, 2010
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for managing UV irradiation for curing semiconductor substrate
- Patent number 7,501,292
- Issue date Mar 10, 2009
- ASM Japan K.K.
- Kiyohiro Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming interconnection in semiconductor device
- Patent number 7,354,852
- Issue date Apr 8, 2008
- ASM Japan K.K.
- Kiyohiro Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming silicon-containing insulation film having low die...
- Patent number 6,818,570
- Issue date Nov 16, 2004
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for Hydrophobization of Surface of Silicon-Containing Film b...
- Publication number 20160093485
- Publication date Mar 31, 2016
- ASM IP HOLDING B.V.
- Akiko Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Treating SiOCH Film With Hydrogen Plasma
- Publication number 20150118864
- Publication date Apr 30, 2015
- ASM IP HOLDING B.V.
- Akinori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method For Restoring Porous Surface Of Dielectric Layer By UV Light...
- Publication number 20150064932
- Publication date Mar 5, 2015
- ASM IP HOLDING B.V.
- Kiyohiro Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Forming SiOCH Film Using Organoaminosilane Annealing
- Publication number 20150056821
- Publication date Feb 26, 2015
- ASM IP HOLDING B.V.
- Dai Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Supplying Gas With Flow Rate Gradient Over Substrate
- Publication number 20140041588
- Publication date Feb 13, 2014
- ASM IP HOLDING B.V.
- Dai Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REPAIRING DAMAGE OF DIELECTRIC FILM BY CYCLIC PROCESSES
- Publication number 20130337583
- Publication date Dec 19, 2013
- ASM IP HOLDING B.V.
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UV Irradiation Apparatus Having UV Lamp-Shared Multiple Process Sta...
- Publication number 20130068970
- Publication date Mar 21, 2013
- ASM JAPAN K.K.
- Kiyohiro Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING INTERCONNECT STRUCTURE HAVING AIRGAP
- Publication number 20110217838
- Publication date Sep 8, 2011
- ASM JAPAN K.K.
- Julian J. Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Sealing Pores at Surface of Dielectric Layer by UV Light...
- Publication number 20110159202
- Publication date Jun 30, 2011
- ASM JAPAN K.K.
- Kiyohiro Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING LOW-K FILM HAVING CHEMICAL RESISTANCE
- Publication number 20100151151
- Publication date Jun 17, 2010
- ASM JAPAN K.K.
- Kiyohiro Matsushita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING DIELECTRIC SiOCH FILM HAVING CHEMICAL STABILITY
- Publication number 20090148964
- Publication date Jun 11, 2009
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CURING MATERIA...
- Publication number 20090093134
- Publication date Apr 9, 2009
- ASM JAPAN K.K.
- Kiyohiro MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CURING MATERIA...
- Publication number 20090093135
- Publication date Apr 9, 2009
- ASM JAPAN K.K.
- Kiyohiro MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANAGING UV IRRADIATION FOR CURING SEMICONDUCTOR SUBSTRATE
- Publication number 20090023229
- Publication date Jan 22, 2009
- ASM JAPAN K.K.
- Kiyohiro MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UV LIGHT IRRADIATING APPARATUS WITH LIQUID FILTER
- Publication number 20080230721
- Publication date Sep 25, 2008
- ASM JAPAN K.K.
- Kiyohiro MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INCREASING MECHANICAL STRENGTH OF DIELECTRIC FILM BY USI...
- Publication number 20080220619
- Publication date Sep 11, 2008
- ASM JAPAN K.K.
- Kiyohiro MATSUSHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING UV IRRADIATION CHAMBER
- Publication number 20080066778
- Publication date Mar 20, 2008
- ASM JAPAN K.K.
- Kiyohiro Matsushita
- B08 - CLEANING
Information Patent Application
METHOD OF FORMING SILICON-CONTAINING INSULATION FILM HAVING LOW DIE...
- Publication number 20060183341
- Publication date Aug 17, 2006
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming interconnection in semiconductor device
- Publication number 20060160352
- Publication date Jul 20, 2006
- ASM JAPAN K.K.
- Kiyohiro Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming silicon-containing insulation film having low die...
- Publication number 20030176030
- Publication date Sep 18, 2003
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kiyohiro Matsushita

Person

Patents Grantslast 30 patents

Method for hydrophobization of surface of silicon-containing film b...

Method for forming SiOCH film using organoaminosilane annealing

Method for restoring porous surface of dielectric layer by UV light...

Method for treating SiOCH film with hydrogen plasma

Method for repairing damage of dielectric film by cyclic processes

Method for supplying gas with flow rate gradient over substrate

Method for forming interconnect structure having airgap

Method for forming dielectric SiOCH film having chemical stability

Method of cleaning UV irradiation chamber

UV light irradiating apparatus with liquid filter

Method of forming silicon-containing insulation film having low die...

Method for managing UV irradiation for curing semiconductor substrate

Method of forming interconnection in semiconductor device

Method of forming silicon-containing insulation film having low die...

Patents Applicationslast 30 patents

Method for Hydrophobization of Surface of Silicon-Containing Film b...

Method for Treating SiOCH Film With Hydrogen Plasma

Method For Restoring Porous Surface Of Dielectric Layer By UV Light...

Method for Forming SiOCH Film Using Organoaminosilane Annealing

Method for Supplying Gas With Flow Rate Gradient Over Substrate

METHOD FOR REPAIRING DAMAGE OF DIELECTRIC FILM BY CYCLIC PROCESSES

UV Irradiation Apparatus Having UV Lamp-Shared Multiple Process Sta...

METHOD FOR FORMING INTERCONNECT STRUCTURE HAVING AIRGAP

Method for Sealing Pores at Surface of Dielectric Layer by UV Light...

METHOD OF FORMING LOW-K FILM HAVING CHEMICAL RESISTANCE

METHOD FOR FORMING DIELECTRIC SiOCH FILM HAVING CHEMICAL STABILITY

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CURING MATERIA...

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CURING MATERIA...

METHOD FOR MANAGING UV IRRADIATION FOR CURING SEMICONDUCTOR SUBSTRATE

UV LIGHT IRRADIATING APPARATUS WITH LIQUID FILTER

METHOD FOR INCREASING MECHANICAL STRENGTH OF DIELECTRIC FILM BY USI...

METHOD OF CLEANING UV IRRADIATION CHAMBER

METHOD OF FORMING SILICON-CONTAINING INSULATION FILM HAVING LOW DIE...

Method of forming interconnection in semiconductor device

Method of forming silicon-containing insulation film having low die...