Kiyohito Ito

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Fishkill, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Partial etch memorization via flash addition
- Patent number 9,576,812
- Issue date Feb 21, 2017
- Tokyo Electron Limited
- Elliott Franke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Material processing to achieve sub-10nm patterning
- Patent number 9,443,731
- Issue date Sep 13, 2016
- Tokyo Electron Limited
- David L. O'Meara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mitigation of asymmetrical profile in self aligned patterning etch
- Patent number 9,257,280
- Issue date Feb 9, 2016
- Tokyo Electron Limited
- Akiteru Ko
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PARTIAL ETCH MEMORIZATION VIA FLASH ADDITION
- Publication number 20160293435
- Publication date Oct 6, 2016
- TOKYO ELECTRON LIMITED
- Elliott Franke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATERIAL PROCESSING TO ACHIEVE SUB-10NM PATTERNING
- Publication number 20160247680
- Publication date Aug 25, 2016
- TOKYO ELECTRON LIMITED
- David L. O'Meara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MITIGATION OF ASYMMETRICAL PROFILE IN SELF ALIGNED PATTERNING ETCH
- Publication number 20140357084
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Akiteru KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20140284308
- Publication date Sep 25, 2014
- KABUSHIKI KAISHA TOSHIBA
- Shoichiro MATSUYAMA
- H01 - BASIC ELECTRIC ELEMENTS