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Semiconductor device
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Patent number 4,926,235
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Issue date May 15, 1990
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Yoichi Tamaki
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device
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Patent number 4,829,361
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Issue date May 9, 1989
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Hitachi, Ltd.
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Kazuhiko Sagara
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma-etching apparatus
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Patent number 4,243,506
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Issue date Jan 6, 1981
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Hitachi, Ltd.
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Kiyoji Ikeda
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H01 - BASIC ELECTRIC ELEMENTS