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Kiyomi Miki
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Chiba, JP
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last 30 patents
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Patent Grant
Copolymer for semiconductor lithography and producing method thereo...
Patent number
7,910,282
Issue date
Mar 22, 2011
Maruzen Petrochemical Co., LTD
Takanori Yamagishi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
COPOLYMER FOR SEMICONDUCTOR LITHOGRAPHY AND PRODUCING METHOD THEREO...
Publication number
20100324245
Publication date
Dec 23, 2010
MARUZEN PETROCHEMICAL CO., LTD.
Takanori YAMAGISHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Copolymer For Semiconductor Lithography And Producing Method Thereo...
Publication number
20080114139
Publication date
May 15, 2008
MARUZEN PETROCHEMICAL CO., LTD.
Takanori Yamagishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY