Kiyoshi Akao

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Scheduling method and program for a substrate processing apparatus
- Patent number 6,889,105
- Issue date May 3, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Nobuhiro Mukuta
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Surface treatment method and apparatus thereof
- Patent number 4,919,073
- Issue date Apr 24, 1990
- Dainippon Screen Mfg. Co., Ltd.
- Atsuo Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface treatment method and apparatus thereof
- Patent number 4,830,888
- Issue date May 16, 1989
- Dainippon Screen Mfg. Co., Ltd.
- Atsuo Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Scheduling method and program for a substrate processing apparatus
- Publication number 20020173868
- Publication date Nov 21, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Nobuhiro Mukuta
- G05 - CONTROLLING REGULATING