Kiyoshi Arakawa

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical filter arrangement for a semiconductor manufacturing appar...
- Patent number 7,186,285
- Issue date Mar 6, 2007
- Canon Kabushiki Kaisha
- Hitoshi Nakano
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Exposure apparatus
- Patent number 7,057,701
- Issue date Jun 6, 2006
- Canon Kabushiki Kaisha
- Takahito Chibana
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, maintenance method therefor, semiconductor devi...
- Patent number 7,034,918
- Issue date Apr 25, 2006
- Canon Kabushiki Kaisha
- Kiyoshi Arakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chemical filter arrangement for a semiconductor manufacturing appar...
- Patent number 6,924,877
- Issue date Aug 2, 2005
- Canon Kabushiki Kaisha
- Hitoshi Nakano
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Exposure apparatus, maintenance method therefor, semiconductor devi...
- Patent number 6,891,593
- Issue date May 10, 2005
- Canon Kabushiki Kaisha
- Kiyoshi Arakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, maintenance method therefor, semiconductor devi...
- Patent number 6,757,048
- Issue date Jun 29, 2004
- Canon Kabushiki Kaisha
- Kiyoshi Arakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor production system with an in-line subsystem
- Patent number 6,356,338
- Issue date Mar 12, 2002
- Canon Kabushiki Kaisha
- Kiyoshi Arakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL FILTER ARRANGEMENT FOR ASEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20070119131
- Publication date May 31, 2007
- Canon Kabushiki Kaisha
- Hitoshi Nakano
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Chemical filter arrangement for a semiconductor manufacturing appar...
- Publication number 20050268581
- Publication date Dec 8, 2005
- Canon Kabushiki Kaisha
- Hitoshi Nakano
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Exposure apparatus, maintenance method therefor, semiconductor devi...
- Publication number 20050146696
- Publication date Jul 7, 2005
- Canon Kabushiki Kaisha
- Kiyoshi Arakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20050030496
- Publication date Feb 10, 2005
- Canon Kabushiki Kaisha
- Takahito Chibana
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, maintenance method therefor, semiconductor devi...
- Publication number 20040017551
- Publication date Jan 29, 2004
- Canon Kabushiki Kaisha
- Kiyoshi Arakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Semiconductor manufacturing apparatus
- Publication number 20030095242
- Publication date May 22, 2003
- Hitoshi Nakano
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Exposure apparatus, maintenance method therefor, semiconductor devi...
- Publication number 20020057422
- Publication date May 16, 2002
- Kiyoshi Arakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kiyoshi Arakawa

Person

Patents Grantslast 30 patents

Chemical filter arrangement for a semiconductor manufacturing appar...

Exposure apparatus

Exposure apparatus, maintenance method therefor, semiconductor devi...

Chemical filter arrangement for a semiconductor manufacturing appar...

Exposure apparatus, maintenance method therefor, semiconductor devi...

Exposure apparatus, maintenance method therefor, semiconductor devi...

Semiconductor production system with an in-line subsystem

Patents Applicationslast 30 patents

CHEMICAL FILTER ARRANGEMENT FOR ASEMICONDUCTOR MANUFACTURING APPARATUS

Chemical filter arrangement for a semiconductor manufacturing appar...

Exposure apparatus, maintenance method therefor, semiconductor devi...

Exposure apparatus

Exposure apparatus, maintenance method therefor, semiconductor devi...

Semiconductor manufacturing apparatus

Exposure apparatus, maintenance method therefor, semiconductor devi...