Kiyoshi Arita

Person

Osaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing device
- Patent number 8,956,499
- Issue date Feb 17, 2015
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Tatsuhiro Mizukami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas shower plate for plasma processing apparatus
- Patent number 8,757,090
- Issue date Jun 24, 2014
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device and method of monitoring plasma discharge...
- Patent number 8,668,836
- Issue date Mar 11, 2014
- Panasonic Corporation
- Tatsuhiro Mizukami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device and plasma discharge state monitoring device
- Patent number 8,585,862
- Issue date Nov 19, 2013
- Panasonic Corporation
- Tatsuhiro Mizukami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 8,558,460
- Issue date Oct 15, 2013
- Panasonic Corporation
- Masaru Nonomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 8,450,933
- Issue date May 28, 2013
- Panasonic Corporation
- Masaru Nonomura
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Manufacturing method for semiconductor chips, and semiconductor chip
- Patent number 8,383,436
- Issue date Feb 26, 2013
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, semiconductor chip manufacturing metho...
- Patent number 8,293,652
- Issue date Oct 23, 2012
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, semiconductor chip manufacturing metho...
- Patent number 8,288,284
- Issue date Oct 16, 2012
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing a substrate, method for manufacturing a semic...
- Patent number 8,158,494
- Issue date Apr 17, 2012
- Panasonic Corporation
- Hiroshi Haji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of segmenting semiconductor wafer
- Patent number 8,110,481
- Issue date Feb 7, 2012
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method for semiconductor chips
- Patent number 8,026,181
- Issue date Sep 27, 2011
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method for semiconductor chips, and semiconductor chip
- Patent number 8,012,805
- Issue date Sep 6, 2011
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma dicing apparatus and method of manufacturing semiconductor c...
- Patent number 7,994,026
- Issue date Aug 9, 2011
- Panasonic Corporation
- Atsushi Harikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method for semiconductor chips and semiconductor wafer
- Patent number 7,989,803
- Issue date Aug 2, 2011
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor chip and method for processi...
- Patent number 7,964,449
- Issue date Jun 21, 2011
- Panasonic Corporation
- Hiroshi Haji
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for dividing semiconductor wafer and manufacturing method fo...
- Patent number 7,927,973
- Issue date Apr 19, 2011
- Panasonic Corporation
- Hiroshi Haji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor devices
- Patent number 7,923,351
- Issue date Apr 12, 2011
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor chip using laser light and pl...
- Patent number 7,906,410
- Issue date Mar 15, 2011
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method for semiconductor chips
- Patent number 7,871,901
- Issue date Jan 18, 2011
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating semiconductor chip
- Patent number 7,767,551
- Issue date Aug 3, 2010
- Panasonic Corporation
- Kiyoshi Arita
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of manufacturing semicondictor chip
- Patent number 7,767,554
- Issue date Aug 3, 2010
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 7,708,860
- Issue date May 4, 2010
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
TEG removing method in manufacturing method for semiconductor chips
- Patent number 7,678,670
- Issue date Mar 16, 2010
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method for semiconductor devices, and formation appar...
- Patent number 7,629,228
- Issue date Dec 8, 2009
- Panasonic Corporation
- Hiroshi Haji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method for semiconductor devices, arrangement determi...
- Patent number 7,488,668
- Issue date Feb 10, 2009
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode member used in a plasma treating apparatus
- Patent number 7,138,034
- Issue date Nov 21, 2006
- Matsushita Electric Industrial Co., Ltd.
- Kiyoshi Arita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treating apparatus, plasma treating method and method of man...
- Patent number 7,074,720
- Issue date Jul 11, 2006
- Matsushita Electric Industrial Co., Ltd.
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cutting semiconductor wafer and protective sheet used in...
- Patent number 7,060,531
- Issue date Jun 13, 2006
- Matsushita Electric Industrial Co., Ltd.
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 7,056,831
- Issue date Jun 6, 2006
- Matsushita Electric Industrial Co., Ltd.
- Tetsuhiro Iwai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, SEMICONDUCTOR CHIP MANUFACTURING METHO...
- Publication number 20120021608
- Publication date Jan 26, 2012
- PANASONIC CORPORATION
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SEMICONDUCTOR CHIP MANUFACTURING METHO...
- Publication number 20120015522
- Publication date Jan 19, 2012
- PANASONIC CORPORATION
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20110277933
- Publication date Nov 17, 2011
- PANASONIC CORPORATION
- Masaru Nonomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20110273094
- Publication date Nov 10, 2011
- PANASONIC CORPORATION
- Masaru Nonomura
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD FOR PROCESSING A SUBSTRATE, METHOD FOR MANUFACTURING A SEMIC...
- Publication number 20110014777
- Publication date Jan 20, 2011
- Hiroshi Haji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SEGMENTING SEMICONDUCTOR WAFER
- Publication number 20100197115
- Publication date Aug 5, 2010
- PANASONIC CORPORATION
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE AND METHOD OF MONITORING PLASMA DISCHARGE...
- Publication number 20100176085
- Publication date Jul 15, 2010
- PANASONIC CORPORATION
- Tatsuhiro Mizukami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR CHIP
- Publication number 20100173474
- Publication date Jul 8, 2010
- Matsushita Electric Industrial Co., Ltd.
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE
- Publication number 20100163182
- Publication date Jul 1, 2010
- PANASONIC CORPORATION
- Tatsuhiro Mizukami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE AND PLASMA DISCHARGE STATE MONITORING DEVICE
- Publication number 20100132890
- Publication date Jun 3, 2010
- PANASONIC CORPORATION
- Tatsuhiro Mizukami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR CHIP AND METHOD FOR PROCESSI...
- Publication number 20100055875
- Publication date Mar 4, 2010
- PANASONIC CORPORATION
- Hiroshi Haji
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA DICING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR C...
- Publication number 20100048001
- Publication date Feb 25, 2010
- Atsushi Harikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR CHIP
- Publication number 20100022071
- Publication date Jan 28, 2010
- PANASONIC CORPORATION
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus
- Publication number 20090266488
- Publication date Oct 29, 2009
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICES
- Publication number 20090209087
- Publication date Aug 20, 2009
- Matsushita Electric Industrial Co., Ltd.
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for dividing semiconductor wafer and manufacturing method fo...
- Publication number 20090197393
- Publication date Aug 6, 2009
- Hiroshi Haji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas Shower Plate for Palsma Processing Apparatus
- Publication number 20090145359
- Publication date Jun 11, 2009
- PANASONIC CORPORATION
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD FOR SEMICONDUCTOR CHIPS
- Publication number 20090093104
- Publication date Apr 9, 2009
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing Method for Semiconductor Chips, and Semiconductor Chip
- Publication number 20090057838
- Publication date Mar 5, 2009
- PANASONIC CORPORATION
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method for semiconductor chips
- Publication number 20090023295
- Publication date Jan 22, 2009
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Fabricating Semiconductor Chip
- Publication number 20090004780
- Publication date Jan 1, 2009
- Matsushita Electric Industrial Co., Ltd.
- Kiyoshi Arita
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Manufacturing Method For Semiconductor Chips And Semiconductor Wafer
- Publication number 20080128694
- Publication date Jun 5, 2008
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATING APPARATUS USING ATOMIC HYDROGEN
- Publication number 20080029197
- Publication date Feb 7, 2008
- Matsushita Electric Industrial Co., Ltd.
- Hiroshi Haji
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Manufacturing Method for Semiconductor Chips, and Semiconductor Chip
- Publication number 20070262420
- Publication date Nov 15, 2007
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing Method For Semiconductor Chips
- Publication number 20070264832
- Publication date Nov 15, 2007
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus
- Publication number 20070095477
- Publication date May 3, 2007
- Matsushita Electric Industrial Co., Ltd.
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method for semiconductor devices, and formation appar...
- Publication number 20060024924
- Publication date Feb 2, 2006
- Hiroshi Haji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method for semiconductor devices, arrangement determi...
- Publication number 20060019416
- Publication date Jan 26, 2006
- Kiyoshi Arita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Plasma treating apparatus and plasma treating method
- Publication number 20050279459
- Publication date Dec 22, 2005
- Matsushita Electric Industrial Co., Ltd.
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus and plasma processing method
- Publication number 20050247404
- Publication date Nov 10, 2005
- Matsushita Electric Industrial Co., Ltd.
- Tetsuhiro Iwai
- H01 - BASIC ELECTRIC ELEMENTS

Kiyoshi Arita

Person

Patents Grantslast 30 patents

Plasma processing device

Gas shower plate for plasma processing apparatus

Plasma processing device and method of monitoring plasma discharge...

Plasma processing device and plasma discharge state monitoring device

Plasma processing apparatus

Plasma processing apparatus

Manufacturing method for semiconductor chips, and semiconductor chip

Substrate processing method, semiconductor chip manufacturing metho...

Substrate processing method, semiconductor chip manufacturing metho...

Method for processing a substrate, method for manufacturing a semic...

Method of segmenting semiconductor wafer

Manufacturing method for semiconductor chips

Manufacturing method for semiconductor chips, and semiconductor chip

Plasma dicing apparatus and method of manufacturing semiconductor c...

Manufacturing method for semiconductor chips and semiconductor wafer

Method for manufacturing semiconductor chip and method for processi...

Method for dividing semiconductor wafer and manufacturing method fo...

Manufacturing method of semiconductor devices

Method of manufacturing semiconductor chip using laser light and pl...

Manufacturing method for semiconductor chips

Method for fabricating semiconductor chip

Method of manufacturing semicondictor chip

Plasma processing apparatus

TEG removing method in manufacturing method for semiconductor chips

Manufacturing method for semiconductor devices, and formation appar...

Manufacturing method for semiconductor devices, arrangement determi...

Electrode member used in a plasma treating apparatus

Plasma treating apparatus, plasma treating method and method of man...

Method of cutting semiconductor wafer and protective sheet used in...

Plasma processing apparatus and plasma processing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD, SEMICONDUCTOR CHIP MANUFACTURING METHO...

SUBSTRATE PROCESSING METHOD, SEMICONDUCTOR CHIP MANUFACTURING METHO...

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

METHOD FOR PROCESSING A SUBSTRATE, METHOD FOR MANUFACTURING A SEMIC...

METHOD OF SEGMENTING SEMICONDUCTOR WAFER

PLASMA PROCESSING DEVICE AND METHOD OF MONITORING PLASMA DISCHARGE...

METHOD OF MANUFACTURING SEMICONDUCTOR CHIP

PLASMA PROCESSING DEVICE

PLASMA PROCESSING DEVICE AND PLASMA DISCHARGE STATE MONITORING DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR CHIP AND METHOD FOR PROCESSI...

PLASMA DICING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR C...

METHOD OF MANUFACTURING SEMICONDUCTOR CHIP

Plasma Processing Apparatus

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICES

Method for dividing semiconductor wafer and manufacturing method fo...

Gas Shower Plate for Palsma Processing Apparatus

MANUFACTURING METHOD FOR SEMICONDUCTOR CHIPS

Manufacturing Method for Semiconductor Chips, and Semiconductor Chip

Manufacturing method for semiconductor chips

Method for Fabricating Semiconductor Chip

Manufacturing Method For Semiconductor Chips And Semiconductor Wafer

SURFACE TREATING APPARATUS USING ATOMIC HYDROGEN

Manufacturing Method for Semiconductor Chips, and Semiconductor Chip

Manufacturing Method For Semiconductor Chips

Plasma processing apparatus

Manufacturing method for semiconductor devices, and formation appar...

Manufacturing method for semiconductor devices, arrangement determi...

Plasma treating apparatus and plasma treating method

Plasma processing apparatus and plasma processing method