Kiyoshi Maeda

Person

Kurokawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method
- Patent number 11,616,194
- Issue date Mar 28, 2023
- Tokyo Electron Limited
- Ken Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching object to be processed
- Patent number 10,685,816
- Issue date Jun 16, 2020
- Tokyo Electron Limited
- Yoshihiro Umezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
- Patent number 10,020,172
- Issue date Jul 10, 2018
- Tokyo Electron Limited
- Mitsunori Ohata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
- Patent number 9,076,636
- Issue date Jul 7, 2015
- Tokyo Electron Limited
- Mitsunori Ohata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method and storage medium
- Patent number 9,059,103
- Issue date Jun 16, 2015
- Tokyo Electron Limited
- Wataru Shimizu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230386787
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Atsutoshi INOKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD
- Publication number 20210028356
- Publication date Jan 28, 2021
- TOKYO ELECTRON LIMITED
- Ken ANDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ETCHING OBJECT TO BE PROCESSED
- Publication number 20180337025
- Publication date Nov 22, 2018
- TOKYO ELECTRON LIMITED
- Yoshihiro UMEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...
- Publication number 20150255255
- Publication date Sep 10, 2015
- TOKYO ELECTRON LIMITED
- Mitsunori Ohata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20120244720
- Publication date Sep 27, 2012
- TOKYO ELECTRON LIMITED
- Wataru SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...
- Publication number 20120061351
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Mitsunori Ohata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kiyoshi Maeda

Person

Patents Grantslast 30 patents

Etching method

Method of etching object to be processed

Plasma processing apparatus, plasma processing method and storage m...

Plasma processing apparatus, plasma processing method and storage m...

Processing method and storage medium

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

ETCHING METHOD

METHOD OF ETCHING OBJECT TO BE PROCESSED

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...

PROCESSING METHOD AND STORAGE MEDIUM

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...