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Kiyoshi Mitani
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Takasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Bonded substrate and manufacturing method thereof
Patent number
8,900,971
Issue date
Dec 2, 2014
Shin-Etsu Handotai Co., Ltd.
Tsuyoshi Ohtsuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing bonded substrate having an insulator layer...
Patent number
8,877,609
Issue date
Nov 4, 2014
Shin-Etsu Handotai Co., Ltd.
Tsuyoshi Ohtsuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon on insulator (SOI) wafer and process for producing same
Patent number
8,703,580
Issue date
Apr 22, 2014
Shin-Etsu Chemical Co., Ltd.
Atsuo Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor substrate having multilayer film and method to reuse...
Patent number
8,575,722
Issue date
Nov 5, 2013
Shin-Etsu Handotai Co., Ltd.
Kiyoshi Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for evaluating oxide dielectric breakdown voltage of a silic...
Patent number
8,551,246
Issue date
Oct 8, 2013
Shin-Etsu Handotai Co., Ltd.
Fumio Tahara
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Silicon on insulator (SOI) wafer and process for producing same
Patent number
8,236,667
Issue date
Aug 7, 2012
Shin-Etsu Chemical Co., Ltd.
Atsuo Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing semiconductor wafer
Patent number
7,959,731
Issue date
Jun 14, 2011
Shin-Etsu Handotai Co., Ltd.
Isao Yokokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for cleaning a multilayer substrate and method for bonding s...
Patent number
7,608,548
Issue date
Oct 27, 2009
Shin-Etsu Handotai Co., Ltd.
Isao Yokokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of bonded wafer
Patent number
7,601,613
Issue date
Oct 13, 2009
Shin-Etsu Handotai Co., Ltd.
Kiyoshi Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
SOI wafer and method for producing the same
Patent number
7,560,313
Issue date
Jul 14, 2009
Shin-Etsu Handotai Co., Ltd.
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing semiconductor wafer
Patent number
7,550,309
Issue date
Jun 23, 2009
Shin-Etsu Handotai Co., Ltd.
Isao Yokokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating bonded wafer
Patent number
7,531,425
Issue date
May 12, 2009
Shin-Etsu Handotai Co., Ltd.
Masatake Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing SOI wafer and SOI wafer
Patent number
7,524,744
Issue date
Apr 28, 2009
Shin-Etsu Handotai Co., Ltd.
Isao Yokokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating SOI wafer
Patent number
7,320,929
Issue date
Jan 22, 2008
Shin-Etsu Handotai Co., Ltd.
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonded wafer and method of producing bonded wafer
Patent number
7,315,064
Issue date
Jan 1, 2008
Shin-Etsu Handotai Co., Ltd.
Kiyoshi Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for treating substrates for microelectronics and substrates...
Patent number
7,235,427
Issue date
Jun 26, 2007
S.O.I. Tec Silicon on Insulator Technologies
Thierry Barge
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing SOI wafer and SOI wafer
Patent number
7,176,102
Issue date
Feb 13, 2007
Shin-Etsu Handotai Co., Ltd.
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing SOI wafer and SOI wafer
Patent number
7,091,107
Issue date
Aug 15, 2006
Shin-Etsu Handotai Co., Ltd.
Isao Yokokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating SOI wafer
Patent number
7,084,046
Issue date
Aug 1, 2006
Shin-Etsu Handotai Co., Ltd.
Kiyoshi Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonded wafer and method of producing bonded wafer
Patent number
7,052,974
Issue date
May 30, 2006
Shin-Etsu Handotai Co., Ltd.
Kiyoshi Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
SOI wafer producing method, and wafer separating jig
Patent number
6,998,329
Issue date
Feb 14, 2006
Shin-Etsu Handotai Co., Ltd.
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Production method for bonded substrates
Patent number
6,959,854
Issue date
Nov 1, 2005
Shin-Etsu Handotai Co., Ltd.
Isao Yokokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for treating substrates for microelectronics and substrates...
Patent number
6,902,988
Issue date
Jun 7, 2005
S.O.I.Tec Silicon on Insulator Technologies S.A.
Thierry Barge
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing bonded wafer and bonded wafer
Patent number
6,900,113
Issue date
May 31, 2005
Shin-Etsu Handotai Co., Ltd.
Masatake Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing bonding wafer
Patent number
6,884,696
Issue date
Apr 26, 2005
Shin-Etsu Handotai Co., Ltd.
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing SOI wafer and SOI wafer
Patent number
6,846,718
Issue date
Jan 25, 2005
Shin-Etsu Handotai Co., Ltd.
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonded wafer producing method and bonded wafer
Patent number
6,797,632
Issue date
Sep 28, 2004
Shin-Etsu Handotai Co., Ltd.
Masatake Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Production method for SOI wafer and SOI wafer
Patent number
6,784,494
Issue date
Aug 31, 2004
Shin-Etsu Handotai, Co., Ltd.
Kiyoshi Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for reclaiming delaminated wafer and reclaimed delaminated w...
Patent number
6,720,640
Issue date
Apr 13, 2004
Shin-Etsu Handotai Co., Ltd.
Susumu Kuwabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing a bonded wafer and the bonded wafer
Patent number
6,716,722
Issue date
Apr 6, 2004
Shin-Etsu Handotai Co., Ltd.
Jun-ichiro Furihata
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR MANUFACTURING BONDED SUBSTRATE HAVING AN INSULATOR LAYER...
Publication number
20140120695
Publication date
May 1, 2014
Shin-Etsu Handotai Co., Ltd.
Tsuyoshi Ohtsuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDED SUBSTRATE AND MANUFACTURING METHOD THEREOF
Publication number
20130341763
Publication date
Dec 26, 2013
Shin-Etsu Handotai Co., Ltd.
Tsuyoshi Ohtsuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR WAFER HAVING MULTILAYER FILM, METHOD FOR PRODUCING TH...
Publication number
20110266655
Publication date
Nov 3, 2011
Shin-Etsu Handotai Co., Ltd.
Kiyoshi Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON SINGLE CRYSTAL WAFER AND METHOD FOR MANUFACTURING SILICON S...
Publication number
20110045246
Publication date
Feb 24, 2011
Shin-Etsu Handotai Co., Ltd.
Fumio Tahara
C30 - CRYSTAL GROWTH
Information
Patent Application
Method for Manufacturing Bonded Substrate
Publication number
20090203167
Publication date
Aug 13, 2009
Shin-Etsu Handotai Co., Ltd.
Kiyoshi Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON ON INSULATOR (SOI) WAFER AND PROCESS FOR PRODUCING SAME
Publication number
20080305317
Publication date
Dec 11, 2008
Shin-Etsu Chemical Co., Ltd.
ATSUO ITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON ON INSULATOR (SOI) WAFER AND PROCESS FOR PRODUCING SAME
Publication number
20080305318
Publication date
Dec 11, 2008
Shin-Etsu Chemical Co., Ltd.
Atsuo Ito
C30 - CRYSTAL GROWTH
Information
Patent Application
SILICON ON INSULATOR (SOI) WAFER AND PROCESS FOR PRODUCING SAME
Publication number
20080299376
Publication date
Dec 4, 2008
Shin-Etsu Chemical Co., Ltd.
ATSUO ITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Manufacturing Method for Bonded Wafer
Publication number
20080286937
Publication date
Nov 20, 2008
Shin-Etsu Handotai Co., Ltd.
Kiyoshi Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method For Producing Semiconductor Wafer
Publication number
20080138959
Publication date
Jun 12, 2008
Shin-Etsu Handotai Co., Ltd.
Isao Yokokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Producing Semiconductor Wafer
Publication number
20080003785
Publication date
Jan 3, 2008
Shin-Etsu Handotai Co., Ltd.
Isao Yokokawa
C30 - CRYSTAL GROWTH
Information
Patent Application
SOI wafer and method for producing the same
Publication number
20070054459
Publication date
Mar 8, 2007
Shin-Etsu Handotai Co., Ltd.
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multilayer substrate cleaning method, substrate bonding method, and...
Publication number
20070023066
Publication date
Feb 1, 2007
Isao Yokokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for producing a semiconductor wafer
Publication number
20060185581
Publication date
Aug 24, 2006
Shin-Etsu Handotai Co., Ltd.
Hiroji Aga
C30 - CRYSTAL GROWTH
Information
Patent Application
Bonded wafer and method of producing bonded wafer
Publication number
20060099791
Publication date
May 11, 2006
Shin-Etsu Handotai Co., Ltd.
Kiyoshi Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing soi wafer and soi wafer
Publication number
20060051945
Publication date
Mar 9, 2006
SHIN-ETSU HANDOTAI CO,. LTD.
Isao Yokokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Soi wafer manufacturing method
Publication number
20060040469
Publication date
Feb 23, 2006
Shin-Etsu Handotai Co., Ltd.
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for treating substrates for microelectronics and substrates...
Publication number
20050208322
Publication date
Sep 22, 2005
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES S.A.
Thierry Barge
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of producing soi wafer and soi wafer
Publication number
20050118789
Publication date
Jun 2, 2005
SHIN-ETSU HANDOTAI CO.,LTD
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for producing SOI wafer and SOI wafer
Publication number
20050042840
Publication date
Feb 24, 2005
Shin-Etsu Handotai Co., Ltd.
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Production method for soi wafer
Publication number
20050014346
Publication date
Jan 20, 2005
Kiyoshi Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pasted wafer and method for producing pasted wafer
Publication number
20050003648
Publication date
Jan 6, 2005
Kiyoshi Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing SOI wafer and thus-manufactured SOI wafer
Publication number
20040259327
Publication date
Dec 23, 2004
Shin-Etsu Handotai Co., Ltd.
Kiyoshi Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Soi wafer and its manufacturing method
Publication number
20040219370
Publication date
Nov 4, 2004
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Soi wafer producing method, and wafer separating jig
Publication number
20040180511
Publication date
Sep 16, 2004
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for producing SOI wafer and SOI wafer
Publication number
20040166650
Publication date
Aug 26, 2004
SHIN-ETSU HANDOTAI CO., LTD.
Isao Yokokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for treating substrates for microelectronics and substrates...
Publication number
20040115905
Publication date
Jun 17, 2004
Thierry Barge
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of producing a bonded wafer and the bonded wafer
Publication number
20040081805
Publication date
Apr 29, 2004
Shin-Etsu Handotai Co., Ltd.
Jun-Ichiro Furihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for producing SOI wafer and SOI wafer
Publication number
20040063298
Publication date
Apr 1, 2004
Shin-Etsu Handotai Co., Ltd.
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Production method for bonded substrates
Publication number
20040035525
Publication date
Feb 26, 2004
Isao Yokokawa
H01 - BASIC ELECTRIC ELEMENTS