Kiyoshi Nashimoto

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Hachiouzi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and substrate processing apparatus
- Patent number 6,785,115
- Issue date Aug 31, 2004
- NGK Insulators, Ltd.
- Hideyoshi Tsuruta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing thin films by plasma-enhanced chemical vapor d...
- Patent number 5,956,616
- Issue date Sep 21, 1999
- Anelva Corporation
- Shigeru Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for controlling temperature in the processi...
- Patent number 5,334,251
- Issue date Aug 2, 1994
- Anelva Corporation
- Kiyoshi Nashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for controlling temperature in the processing of a substrate
- Patent number 5,147,498
- Issue date Sep 15, 1992
- Anelva Corporation
- Kiyoshi Nashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic chuck and substrate processing apparatus
- Publication number 20020159217
- Publication date Oct 31, 2002
- NGK Insulators, Ltd.
- Hideyoshi Tsuruta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...