Kiyoshi Suzuki

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Oshu-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system
- Patent number 11,081,377
- Issue date Aug 3, 2021
- Tokyo Electron Limited
- Ryota Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of optimizing process recipe of substrate processing system
- Patent number 8,082,054
- Issue date Dec 20, 2011
- Tokyo Electron Limited
- Kaname Yamaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of optimizing process recipe of substrate processing system
- Patent number 7,738,983
- Issue date Jun 15, 2010
- Tokyo Electron Limited
- Kaname Yamaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSPORT METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20230230862
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Kiyoshi SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20200118851
- Publication date Apr 16, 2020
- TOKYO ELECTRON LIMITED
- Ryota GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPTIMIZING PROCESS RECIPE OF SUBSTRATE PROCESSING SYSTEM
- Publication number 20100198386
- Publication date Aug 5, 2010
- TOKYO ELECTRON LIMITED
- Kaname Yamaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of optimizing process recipe of substrate processing system
- Publication number 20080086228
- Publication date Apr 10, 2008
- TOKYO ELECTRON LIMITED
- Kaname Yamaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...