TREA

Kiyotaka Akiyama

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  • Kofu, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Apparatus for detecting and aligning a substrate
    • Patent number 5,636,960
    • Issue date Jun 10, 1997
    • Tokyo Electron Limited
    • Tutomu Hiroki
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Multi-chamber system
    • Patent number 5,558,482
    • Issue date Sep 24, 1996
    • Tokyo Electron Limited
    • Tutomu Hiroki
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL