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Kiyotaka Akiyama
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Kofu, JP
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last 30 patents
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Patent Grant
Apparatus for detecting and aligning a substrate
Patent number
5,636,960
Issue date
Jun 10, 1997
Tokyo Electron Limited
Tutomu Hiroki
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
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Patent Grant
Multi-chamber system
Patent number
5,558,482
Issue date
Sep 24, 1996
Tokyo Electron Limited
Tutomu Hiroki
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL