Kiyotaka Ishibashi

Person

Amagasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,692,269
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Hiroyuki Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,570,512
- Issue date Feb 25, 2020
- Tokyo Electron Limited
- Toshihiko Iwao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Placing bed structure, treating apparatus using the structure, and...
- Patent number 10,388,557
- Issue date Aug 20, 2019
- Tokyo Electron Limited
- Kohei Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 9,767,993
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower plate sintered integrally with gas release hole member and m...
- Patent number 9,767,994
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing device
- Patent number 9,670,584
- Issue date Jun 6, 2017
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antenna, dielectric window, plasma processing apparatus and plasma...
- Patent number 9,595,425
- Issue date Mar 14, 2017
- Tokyo Electron Limited
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, plasma processing method and high freq...
- Patent number 9,418,822
- Issue date Aug 16, 2016
- Tokyo Electron Limited
- Kazushi Kaneko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus and substrate processing method
- Patent number 9,237,638
- Issue date Jan 12, 2016
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Placing bed structure, treating apparatus using the structure, and...
- Patent number 9,177,846
- Issue date Nov 3, 2015
- Tokyo Electron Limited
- Kohei Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 9,111,726
- Issue date Aug 18, 2015
- Tokyo Electron Limited
- Kazuki Moyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Top plate of microwave plasma processing apparatus, plasma processi...
- Patent number 8,967,080
- Issue date Mar 3, 2015
- Tokyo Electron Limited
- Caizhong Tian
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Manufacturing method of top plate of plasma processing apparatus
- Patent number 8,925,351
- Issue date Jan 6, 2015
- Tokyo Electron Limited
- Caizhong Tian
- B32 - LAYERED PRODUCTS
Information Patent Grant
Shower plate sintered integrally with gas release hole member and m...
- Patent number 8,915,999
- Issue date Dec 23, 2014
- Tokyo Electron Limited
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning plasma-treating apparatus, plasma-treating appar...
- Patent number 8,419,859
- Issue date Apr 16, 2013
- Tokyo Electron Limited
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing unit
- Patent number 8,387,560
- Issue date Mar 5, 2013
- Tokyo Electron Limited
- Caizhong Tian
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Shower plate, method for manufacturing the shower plate, plasma pro...
- Patent number 8,372,200
- Issue date Feb 12, 2013
- Tokyo Electron Ltd.
- Masahiro Okesaku
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Ceiling plate and plasma process apparatus
- Patent number 8,343,308
- Issue date Jan 1, 2013
- Tokyo Electron Limited
- Caizhong Tian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method for adjusting plasma density...
- Patent number 8,273,210
- Issue date Sep 25, 2012
- Tokyo Electron Limited
- Caizhong Tian
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,267,040
- Issue date Sep 18, 2012
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,267,042
- Issue date Sep 18, 2012
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sealing structure of plasma processing apparatus, sealing method, a...
- Patent number 8,069,704
- Issue date Dec 6, 2011
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 7,940,009
- Issue date May 10, 2011
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing equipment
- Patent number 7,930,992
- Issue date Apr 26, 2011
- Tokyo Electron Limited
- Toshihisa Nozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device
- Patent number 7,828,927
- Issue date Nov 9, 2010
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device
- Patent number 7,779,783
- Issue date Aug 24, 2010
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device
- Patent number 7,469,654
- Issue date Dec 30, 2008
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam analyzing apparatus
- Patent number 5,350,920
- Issue date Sep 27, 1994
- Kabushiki Kaisha Kobe Seiko Sho
- Hirofumi Fukuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle accelerator
- Patent number 5,280,252
- Issue date Jan 18, 1994
- Kabushiki Kaisha Kobe Seiko Sho
- Ken-ichi Inoue
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Converged ion beam apparatus
- Patent number 5,063,294
- Issue date Nov 5, 1991
- Kabushiki Kaisha Kobe Seiko Sho
- Yutaka Kawata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20200378005
- Publication date Dec 3, 2020
- TOKYO ELECTRON LIMITED
- Hiroyuki MATSUURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170253972
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Kiyotaka ISHIBASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20160093474
- Publication date Mar 31, 2016
- TOKYO ELECTRON LIMITED
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLACING BED STRUCTURE, TREATING APPARATUS USING THE STRUCTURE, AND...
- Publication number 20160020135
- Publication date Jan 21, 2016
- TOKYO ELECTRON LIMITED
- Kohei Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150232993
- Publication date Aug 20, 2015
- TOKYO ELECTRON LIMITED
- Toshihiko IWAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150197853
- Publication date Jul 16, 2015
- TOHOKU TECHNO ARCH CO., LTD.
- Kiyotaka ISHIBASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND M...
- Publication number 20150069674
- Publication date Mar 12, 2015
- TOKYO ELECTRON LIMITED
- Masahiro OKESAKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20140262034
- Publication date Sep 18, 2014
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND HIGH FREQ...
- Publication number 20140225504
- Publication date Aug 14, 2014
- TOKYO ELECTRON LIMITED
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE
- Publication number 20140102367
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF TOP PLATE OF PLASMA PROCESSING APPARATUS
- Publication number 20130292047
- Publication date Nov 7, 2013
- Caizhong Tian
- B32 - LAYERED PRODUCTS
Information Patent Application
SHOWER PLATE, MANUFACTURING METHOD OF THE SHOWER PLATE, AND PLASMA...
- Publication number 20130112337
- Publication date May 9, 2013
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Masahiro Okesaku
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CEILING PLATE AND PLASMA PROCESS APPARATUS
- Publication number 20130081763
- Publication date Apr 4, 2013
- TOKYO ELECTRON LIMITED
- Caizhong Tian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTENNA, DIELECTRIC WINDOW, PLASMA PROCESSING APPARATUS AND PLASMA...
- Publication number 20130008607
- Publication date Jan 10, 2013
- TOKYO ELECTRON LIMITED
- Naoki MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120267048
- Publication date Oct 25, 2012
- TOKYO ELECTRON LIMITED
- Kazuki Moyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20120160809
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND COOLING DEVICE FOR PLASMA PROCESSIN...
- Publication number 20120118505
- Publication date May 17, 2012
- TOKYO ELECTRON LIMITED
- Kiyotaka Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOP PLATE OF MICROWAVE PLASMA PROCESSING APPARATUS, PLASMA PROCESSI...
- Publication number 20110000780
- Publication date Jan 6, 2011
- TOKYO ELECTRON LIMITED
- Caizhong Tian
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TOP PLATE AND PLASMA PROCESS APPARATUS EMPLOYING THE SAME
- Publication number 20100288439
- Publication date Nov 18, 2010
- TOKYO ELECTRON LIMITED
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLACING BED STRUCTURE, TREATING APPARATUS USING THE STRUCTURE, AND...
- Publication number 20100264115
- Publication date Oct 21, 2010
- TOKYO ELECTRON LIMITED
- Kohei Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR ADJUSTING PLASMA DENSITY...
- Publication number 20100252412
- Publication date Oct 7, 2010
- TOKYO ELECTRON LIMITED
- Caizhong Tian
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Shower Plate, Method for Manufacturing the Shower Plate, Plasma Pro...
- Publication number 20100230387
- Publication date Sep 16, 2010
- Tokyo Electron Limited
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND M...
- Publication number 20100178775
- Publication date Jul 15, 2010
- TOKYO ELECTRON LIMITED
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING PLASMA-TREATING APPARATUS, PLASMA-TREATING APPAR...
- Publication number 20100175713
- Publication date Jul 15, 2010
- TOKYO ELECTRON LIMITED
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CEILING PLATE AND PLASMA PROCESS APPARATUS
- Publication number 20100032094
- Publication date Feb 11, 2010
- TOKYO ELECTRON LIMITED
- Caizhong Tian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER PLATE AND MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSIN...
- Publication number 20090311869
- Publication date Dec 17, 2009
- TOKYO ELECTRON LIMITED
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20090291563
- Publication date Nov 26, 2009
- TOKYO ELECTRON LIMITED
- Kiyotaka ISHIBASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER PLATE, AND PLASMA PROCESSING APPARATUS, PLASMA PROCESSING ME...
- Publication number 20090286405
- Publication date Nov 19, 2009
- TOKYO ELECTRON LIMITED
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20090266711
- Publication date Oct 29, 2009
- TOKYO ELECTRON LIMITED
- Kiyotaka ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALING STRUCTURE OF PLASMA PROCESSING APPARATUS, SEALING METHOD, A...
- Publication number 20090255324
- Publication date Oct 15, 2009
- TOKYO ELECTRON LIMITED
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kiyotaka Ishibashi

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Substrate processing apparatus

Placing bed structure, treating apparatus using the structure, and...

Plasma processing apparatus

Shower plate sintered integrally with gas release hole member and m...

Plasma processing device

Antenna, dielectric window, plasma processing apparatus and plasma...

Plasma processing apparatus, plasma processing method and high freq...

Plasma processing apparatus and substrate processing method

Placing bed structure, treating apparatus using the structure, and...

Plasma processing apparatus

Top plate of microwave plasma processing apparatus, plasma processi...

Manufacturing method of top plate of plasma processing apparatus

Shower plate sintered integrally with gas release hole member and m...

Method of cleaning plasma-treating apparatus, plasma-treating appar...

Plasma processing unit

Shower plate, method for manufacturing the shower plate, plasma pro...

Ceiling plate and plasma process apparatus

Plasma processing apparatus and method for adjusting plasma density...

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and plasma processing method

Sealing structure of plasma processing apparatus, sealing method, a...

Plasma processing apparatus

Plasma processing equipment

Plasma processing device

Plasma processing device

Plasma processing device

Ion beam analyzing apparatus

Charged particle accelerator

Converged ion beam apparatus

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

PLACING BED STRUCTURE, TREATING APPARATUS USING THE STRUCTURE, AND...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND M...

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND HIGH FREQ...

PLASMA PROCESSING DEVICE

MANUFACTURING METHOD OF TOP PLATE OF PLASMA PROCESSING APPARATUS

SHOWER PLATE, MANUFACTURING METHOD OF THE SHOWER PLATE, AND PLASMA...

CEILING PLATE AND PLASMA PROCESS APPARATUS

ANTENNA, DIELECTRIC WINDOW, PLASMA PROCESSING APPARATUS AND PLASMA...

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND COOLING DEVICE FOR PLASMA PROCESSIN...

TOP PLATE OF MICROWAVE PLASMA PROCESSING APPARATUS, PLASMA PROCESSI...

TOP PLATE AND PLASMA PROCESS APPARATUS EMPLOYING THE SAME

PLACING BED STRUCTURE, TREATING APPARATUS USING THE STRUCTURE, AND...

PLASMA PROCESSING APPARATUS AND METHOD FOR ADJUSTING PLASMA DENSITY...

Shower Plate, Method for Manufacturing the Shower Plate, Plasma Pro...

SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND M...

METHOD OF CLEANING PLASMA-TREATING APPARATUS, PLASMA-TREATING APPAR...

CEILING PLATE AND PLASMA PROCESS APPARATUS

SHOWER PLATE AND MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSIN...

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

SHOWER PLATE, AND PLASMA PROCESSING APPARATUS, PLASMA PROCESSING ME...

SUBSTRATE PROCESSING APPARATUS

SEALING STRUCTURE OF PLASMA PROCESSING APPARATUS, SEALING METHOD, A...