Kiyotaka Kikuchi

Follow

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film formation apparatus and method for using same
- Patent number 8,349,401
- Issue date Jan 8, 2013
- Tokyo Electron Limited
- Jun Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMATION APPARATUS AND METHOD FOR USING SAME
- Publication number 20100189927
- Publication date Jul 29, 2010
- TOKYO ELECTRON LIMITED
- Jun SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...