Kiyoto Inomata

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for plasma processing and apparatus for plasma processing
- Patent number 5,549,780
- Issue date Aug 27, 1996
- Semiconductor Energy Laboratory Co., Ltd.
- Hideomi Koinuma
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL