Klaus Boehm

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Schleifreisen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for mask inspection for mask design and mask production
- Patent number 8,705,838
- Issue date Apr 22, 2014
- Carl Zeiss SMS GmbH
- Klaus Boehm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method for Mask Inspection for Mask Design and Mask Production
- Publication number 20080247632
- Publication date Oct 9, 2008
- Klaus Boehm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Arrangement of aperture diaphragms and/or filters, with changeable...
- Publication number 20060291031
- Publication date Dec 28, 2006
- Klaus Boehm
- G02 - OPTICS