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Klaus Breitschwerdt
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Filderstadt, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method of etching structures into an etching body using a plasma
Patent number
7,785,486
Issue date
Aug 31, 2010
Robert Bosch GmbH
Andrea Urban
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Layer and system with a silicon layer and a passivation layer, meth...
Patent number
7,642,545
Issue date
Jan 5, 2010
Robert Bosch GmbH
Andrea Urban
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device and method for anisotropic plasma etching of a substrate, pa...
Patent number
7,288,485
Issue date
Oct 30, 2007
Robert Bosch GmbH
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for anisotropic plasma etching of a substrate, a...
Patent number
7,285,228
Issue date
Oct 23, 2007
Robert Bosch GmbH
Franz Laermer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Holding device, in particular for fixing a semiconductor wafer in a...
Patent number
7,149,070
Issue date
Dec 12, 2006
Robert Bosch GmbH
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for etching a substrate by using an inductively c...
Patent number
7,094,706
Issue date
Aug 22, 2006
Robert Bosch GmbH
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for providing a semiconductor etching end point a...
Patent number
6,974,709
Issue date
Dec 13, 2005
Robert Bosch GmbH
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for etching a substrate by using an inductively c...
Patent number
6,709,546
Issue date
Mar 23, 2004
Robert Bosch GmbH
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing three-dimensional structures by means of an et...
Patent number
6,663,784
Issue date
Dec 16, 2003
Robert Bosch GmbH
Nils Kummer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Electrical system, especially a microelectronic or microelectromech...
Publication number
20060097388
Publication date
May 11, 2006
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Layer system with a silicon layer and a passivation layer, method f...
Publication number
20060068510
Publication date
Mar 30, 2006
Andrea Urban
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Device and method for anisotropically plasma etching of a substrate...
Publication number
20050126710
Publication date
Jun 16, 2005
Franz Laermer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and method for etching a substrate by using an inductively c...
Publication number
20040149388
Publication date
Aug 5, 2004
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and method for anisotropic plasma etching of a substrate, pa...
Publication number
20040134615
Publication date
Jul 15, 2004
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of etching structures into an etching body using a plasma
Publication number
20040124177
Publication date
Jul 1, 2004
Andrea Urban
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Module, especially a wafer module
Publication number
20040084398
Publication date
May 6, 2004
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for etching a semiconductor element, its use for etching end...
Publication number
20030224539
Publication date
Dec 4, 2003
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and method for etching a substrate by using an inductively c...
Publication number
20020046987
Publication date
Apr 25, 2002
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS