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Klaus-Dieter Adam
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Jena, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Device and method for automatic detection of incorrect measurements...
Patent number
8,154,595
Issue date
Apr 10, 2012
Vistec Semiconductor Systems Jena GmbH
Hans-Artur Boesser
G01 - MEASURING TESTING
Information
Patent Grant
Coordinate measuring machine for measuring structures on a substrate
Patent number
7,961,334
Issue date
Jun 14, 2011
Vistec Semiconductor Systems GmbH
Hans-Artur Boesser
G01 - MEASURING TESTING
Information
Patent Grant
Method for determining positions of structures on a substrate
Patent number
7,948,635
Issue date
May 24, 2011
Vistec Semiconductor Systems GmbH
Katrin Pietsch
G01 - MEASURING TESTING
Information
Patent Grant
Device for measuring the position of at least one structure on a su...
Patent number
7,872,763
Issue date
Jan 18, 2011
Vistec Semiconductor Systems GmbH
Katrin Pietsch
G01 - MEASURING TESTING
Information
Patent Grant
Method for correcting measuring errors caused by the lens distortio...
Patent number
7,769,556
Issue date
Aug 3, 2010
Vistec Semiconductor Systems GmbH
Michael Heiden
G01 - MEASURING TESTING
Information
Patent Grant
Method for determining the focal position of at least two edges of...
Patent number
7,551,296
Issue date
Jun 23, 2009
Vistec Semiconductor Systems GmbH
Hans-Artur Boesser
G02 - OPTICS
Information
Patent Grant
Measuring device and method for determining relative positions of a...
Patent number
7,450,246
Issue date
Nov 11, 2008
Vistec Semiconductor Systems GmbH
Hans-Artur Boesser
G01 - MEASURING TESTING
Information
Patent Grant
Dual-mode electron beam lithography machine
Patent number
7,053,388
Issue date
May 30, 2006
Leica Microsystems Lithography Ltd.
Nigel Crosland
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Apparatus and method for supporting a substrate at a position with...
Publication number
20090126525
Publication date
May 21, 2009
Vistec Semiconductor Systems GmbH
Katrin Pietsch
G01 - MEASURING TESTING
Information
Patent Application
Device for measuring the position of at least one structure on a su...
Publication number
20090128828
Publication date
May 21, 2009
Vistec Semiconductor Systems GmbH
Katrin Pietsch
G01 - MEASURING TESTING
Information
Patent Application
Method for determining positions of structures on a substrate
Publication number
20090109443
Publication date
Apr 30, 2009
Vistec Semiconductor Systems GmbH
Katrin Pietsch
G01 - MEASURING TESTING
Information
Patent Application
Method for correcting measuring errors caused by the lens distortio...
Publication number
20090070059
Publication date
Mar 12, 2009
Vistec Semiconductor Systems GmbH
Michael Heiden
G01 - MEASURING TESTING
Information
Patent Application
Coordinate measuring machine for measuring structures on a substrate
Publication number
20090031572
Publication date
Feb 5, 2009
Vistec Semiconductor Systems GmbH
Hans-Artur Boesser
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR DETERMINING THE FOCAL POSITION OF AT LEAST TWO EDGES OF...
Publication number
20080252903
Publication date
Oct 16, 2008
Vistec Semiconductor Systems GmbH
Hans-Artur Boesser
G02 - OPTICS
Information
Patent Application
DEVICE AND METHOD FOR AUTOMATIC DETECTION OF INCORRECT MEASUREMENTS...
Publication number
20080202201
Publication date
Aug 28, 2008
Vistec Semiconductor Systems Jena GmbH
Hans-Artur Boesser
G01 - MEASURING TESTING
Information
Patent Application
Measuring device and method for determining relative positions of a...
Publication number
20060279743
Publication date
Dec 14, 2006
Vistec Semiconductor Systems GmbH
Hans-Artur Boesser
G01 - MEASURING TESTING
Information
Patent Application
Dual-mode electron beam lithography machine
Publication number
20050045836
Publication date
Mar 3, 2005
Leica Microsystems Lithography Ltd.
Nigel Crosland
B82 - NANO-TECHNOLOGY