Klaus Flock

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Broadband and wide field angle compensator
- Patent number 9,857,292
- Issue date Jan 2, 2018
- KLA-Tencor Corporation
- Lawrence Rotter
- G02 - OPTICS
Information Patent Grant
Broadband and wide field angle compensator
- Patent number 9,519,093
- Issue date Dec 13, 2016
- KLA-Tencor Corporation
- Lawrence Rotter
- G02 - OPTICS
Information Patent Grant
Pulsed laser induced plasma light source
- Patent number 9,506,871
- Issue date Nov 29, 2016
- KLA-Tencor Corporation
- Klaus Flock
- G02 - OPTICS
Information Patent Grant
Selectably configurable multiple mode spectroscopic ellipsometry
- Patent number 9,404,872
- Issue date Aug 2, 2016
- KLA-Tencor Corporation
- Haiming Wang
- G01 - MEASURING TESTING
Information Patent Grant
Multiple angles of incidence semiconductor metrology systems and me...
- Patent number 9,310,290
- Issue date Apr 12, 2016
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Two dimensional optical detector with multiple shift registers
- Patent number 9,217,717
- Issue date Dec 22, 2015
- KLA-Tencor Corporation
- Klaus Flock
- G01 - MEASURING TESTING
Information Patent Grant
Light source tracking in optical metrology system
- Patent number 9,146,156
- Issue date Sep 29, 2015
- KLA-Tencor Corporation
- Guorong V. Zhuang
- G01 - MEASURING TESTING
Information Patent Grant
Multiple angles of incidence semiconductor metrology systems and me...
- Patent number 9,116,103
- Issue date Aug 25, 2015
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Selective diffraction with in-series gratings
- Patent number 8,873,050
- Issue date Oct 28, 2014
- KLA-Tencor Corp.
- Klaus Flock
- G01 - MEASURING TESTING
Information Patent Grant
Complementary waveplate rotating compensator ellipsometer
- Patent number 7,889,339
- Issue date Feb 15, 2011
- KLA-Tencor Corporation
- Klaus Flock
- G01 - MEASURING TESTING
Information Patent Grant
Normal incidence ellipsometer with complementary waveplate rotating...
- Patent number 7,889,340
- Issue date Feb 15, 2011
- KLA-Tencor Corporation
- Klaus Flock
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Broadband And Wide Field Angle Compensator
- Publication number 20170052112
- Publication date Feb 23, 2017
- KLA-Tencor Corporation
- Lawrence Rotter
- G02 - OPTICS
Information Patent Application
MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...
- Publication number 20150285735
- Publication date Oct 8, 2015
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
Broadband And Wide Field Angle Compensator
- Publication number 20150055123
- Publication date Feb 26, 2015
- KLA-Tencor Corporation
- Lawrence Rotter
- G02 - OPTICS
Information Patent Application
MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...
- Publication number 20140375981
- Publication date Dec 25, 2014
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
TWO DIMENSIONAL OPTICAL DETECTOR WITH MULTIPLE SHIFT REGISTERS
- Publication number 20140166862
- Publication date Jun 19, 2014
- Klaus Flock
- G01 - MEASURING TESTING
Information Patent Application
Calibration Of An Optical Metrology System For Critical Dimension A...
- Publication number 20130245985
- Publication date Sep 19, 2013
- KLA-Tencor Corporation
- Klaus Flock
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT SOURCE TRACKING IN OPTICAL METROLOGY SYSTEM
- Publication number 20130033704
- Publication date Feb 7, 2013
- KLA-Tencor Corporation
- Guorong V. Zhuang
- G01 - MEASURING TESTING

Klaus Flock

Person

Patents Grantslast 30 patents

Broadband and wide field angle compensator

Broadband and wide field angle compensator

Pulsed laser induced plasma light source

Selectably configurable multiple mode spectroscopic ellipsometry

Multiple angles of incidence semiconductor metrology systems and me...

Two dimensional optical detector with multiple shift registers

Light source tracking in optical metrology system

Multiple angles of incidence semiconductor metrology systems and me...

Selective diffraction with in-series gratings

Complementary waveplate rotating compensator ellipsometer

Normal incidence ellipsometer with complementary waveplate rotating...

Patents Applicationslast 30 patents

Broadband And Wide Field Angle Compensator

MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...

Broadband And Wide Field Angle Compensator

MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...

TWO DIMENSIONAL OPTICAL DETECTOR WITH MULTIPLE SHIFT REGISTERS

Calibration Of An Optical Metrology System For Critical Dimension A...

LIGHT SOURCE TRACKING IN OPTICAL METROLOGY SYSTEM