Klaus Funk

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Ottobrunn, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for thermally treating disk-shaped substrates
- Patent number 7,098,157
- Issue date Aug 29, 2006
- Mattson Thermal Products GmbH
- Klaus Funk
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Heating blocks
- Publication number 20090134146
- Publication date May 28, 2009
- Deutsches Zentrum fuer Luft-und Raumfahrt e.V.
- Hermann Hald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for thermally treating disk-shaped substrates
- Publication number 20060115968
- Publication date Jun 1, 2006
- Klaus Funk
- H01 - BASIC ELECTRIC ELEMENTS