Klaus Mann

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Gottingen, DE

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Patents Grantslast 30 patents

Information Patent Grant
VUV laser beam characterization system
- Patent number 6,624,424
- Issue date Sep 23, 2003
- Lambda Physik AG
- Gerd Eckert
- G01 - MEASURING TESTING
Information Patent Grant
Optical pulse stretching and smoothing for ArF and F2 lithography e...
- Patent number 6,389,045
- Issue date May 14, 2002
- Lambda Physik AG
- Klaus Mann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stabilization of angular and lateral laser beam position
- Patent number 6,014,206
- Issue date Jan 11, 2000
- Lambda Physik GmbH
- Dirk Basting
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
VUV LASER BEAM CHARACTERIZATION SYSTEM
- Publication number 20030150997
- Publication date Aug 14, 2003
- Gerd Eckert
- G01 - MEASURING TESTING