Klaus Martin HUMMLER

Person

  • San Diego, CA, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    GUIDING DEVICE AND ASSOCIATED SYSTEM

    • Publication number 20240085796
    • Publication date Mar 14, 2024
    • ASML NETHERLANDS B.V.
    • Dzmitry LABETSKI
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

    • Publication number 20220291591
    • Publication date Sep 15, 2022
    • ASML NETHERLANDS B.V.
    • Yue Ma
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    OXYGEN-LOSS RESISTANT TOP COATING FOR OPTICAL ELEMENTS

    • Publication number 20220260756
    • Publication date Aug 18, 2022
    • ASML NETHERLANDS B.V.
    • Yue Ma
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SYSTEM FOR MONITORING A PLASMA

    • Publication number 20220151052
    • Publication date May 12, 2022
    • ASML NETHERLANDS B.V.
    • Michael Anthony Purvis
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    GUIDING DEVICE AND ASSOCIATED SYSTEM

    • Publication number 20210141311
    • Publication date May 13, 2021
    • ASML NETHERLANDS B.V.
    • Dzmitry LABETSKI
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

    • Publication number 20210109452
    • Publication date Apr 15, 2021
    • ASML NETHERLANDS B.V.
    • Yue Ma
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SYSTEM FOR MONITORING A PLASMA

    • Publication number 20200344868
    • Publication date Oct 29, 2020
    • ASML NETHERLANDS B.V.
    • Michael Anthony Purvis
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    GUIDING DEVICE AND ASSOCIATED SYSTEM

    • Publication number 20200089124
    • Publication date Mar 19, 2020
    • ASML NETHERLANDS B.V.
    • Dzmitry LABETSKI
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY