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Klaus Mayer
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Munchen, DE
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Patents Grants
last 30 patents
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Patent Grant
MEMS device stress-reducing structure
Patent number
11,142,453
Issue date
Oct 12, 2021
TDK Corporation
Klaus Mayer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
MEMS Device
Publication number
20190375630
Publication date
Dec 12, 2019
TDK Electronics AG
Klaus Mayer
B81 - MICRO-STRUCTURAL TECHNOLOGY