Klaus Mehlkopp

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Alsdorf, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical system with isolated measuring structure
- Patent number 6,864,988
- Issue date Mar 8, 2005
- Carl Zeiss Semiconductor Manufacturing Technologies AG
- Albrecht Hof
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 6,750,949
- Issue date Jun 15, 2004
- AMSL Netherlands B.V.
- Erik Roelof Loopstra
- G02 - OPTICS
Information Patent Grant
Process for manufacturing optical surfaces and shaping machine for...
- Patent number 6,523,443
- Issue date Feb 25, 2003
- Carl-Zeiss-Stiftung, Heidenheim/Brenz
- Albrecht Hof
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20030058422
- Publication date Mar 27, 2003
- Erik Roelof Loopstra
- G02 - OPTICS
Information Patent Application
Optical system with a plurality of optical elements
- Publication number 20030010902
- Publication date Jan 16, 2003
- CARL-ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
- Albrecht Hof
- G02 - OPTICS