Klaus Penner

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Otendorf-Okrilla, DE

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Patents Grantslast 30 patents

Information Patent Grant
Fabrication of trench capacitors using disposable hard mask
- Patent number 6,190,955
- Issue date Feb 20, 2001
- International Business Machines Corporation
- Matthias Ilg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of gas content in process liquids for improved megasonic cl...
- Patent number 5,800,626
- Issue date Sep 1, 1998
- International Business Machines Corporation
- Susan Cohen
- B08 - CLEANING