Klaus Petry

Person

Merrimack, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method to monitor glitch energy
- Patent number 10,770,261
- Issue date Sep 8, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Larry G. Nelson
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Semiconductor workpiece temperature measurement system
- Patent number 10,739,208
- Issue date Aug 11, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor workpiece temperature measurement system
- Patent number 9,933,314
- Issue date Apr 3, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with radiative heating
- Patent number 8,987,639
- Issue date Mar 24, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Current limiter for high voltage power supply used with ion implant...
- Patent number 8,766,209
- Issue date Jul 1, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Becker
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
FinFET device fabrication using thermal implantation
- Patent number 8,722,431
- Issue date May 13, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Nilay Anil Pradhan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platen clamping surface monitoring
- Patent number 8,592,786
- Issue date Nov 26, 2013
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removal of charge between a substrate and an electrostatic clamp
- Patent number 8,531,814
- Issue date Sep 10, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Combination load lock for handling workpieces
- Patent number 7,828,504
- Issue date Nov 9, 2010
- Axcellis Technologies, Inc.
- Michel Pharand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load lock control
- Patent number 7,381,969
- Issue date Jun 3, 2008
- Axcelis Technologies, Inc.
- Tariq Fasheh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source for use in an ion implanter
- Patent number 7,105,840
- Issue date Sep 12, 2006
- Axcelis Technologies, Inc.
- Klaus Becker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam measurement systems and methods for ion implant dose and u...
- Patent number 6,992,309
- Issue date Jan 31, 2006
- Axcelis Technologies, Inc.
- Klaus Petry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for the grounding of process wafers by the use...
- Patent number 6,552,892
- Issue date Apr 22, 2003
- Axcelis Technologies, Inc.
- James C. Carroll
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
System And Method To Monitor Glitch Energy
- Publication number 20190189390
- Publication date Jun 20, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Larry G. Nelson
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Semiconductor Workpiece Temperature Measurement System
- Publication number 20190170591
- Publication date Jun 6, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- G01 - MEASURING TESTING
Information Patent Application
Semiconductor Workpiece Temperature Measurement System
- Publication number 20180003567
- Publication date Jan 4, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- G01 - MEASURING TESTING
Information Patent Application
ELECTROSTATIC CHUCK WITH RADIATIVE HEATING
- Publication number 20140061180
- Publication date Mar 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Finfet Device Fabrication Using Thermal Implantation
- Publication number 20130252349
- Publication date Sep 26, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Nilay Anil Pradhan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATEN CLAMPING SURFACE MONITORING
- Publication number 20130248738
- Publication date Sep 26, 2013
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CURRENT LIMITER FOR HIGH VOLTAGE POWER SUPPLY USED WITH ION IMPLANT...
- Publication number 20130020940
- Publication date Jan 24, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Becker
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
REMOVAL OF CHARGE BETWEEN A SUBSTRATE AND AN ELECTROSTATIC CLAMP
- Publication number 20100265631
- Publication date Oct 21, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Combination load lock for handling workpieces
- Publication number 20070264105
- Publication date Nov 15, 2007
- Axcelis Technologies Inc.
- Michel Pharand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Load lock control
- Publication number 20070246658
- Publication date Oct 25, 2007
- Axcelis Technologies, Inc.
- Tariq Fasheh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE FOR USE IN AN ION IMPLANTER
- Publication number 20060169921
- Publication date Aug 3, 2006
- Axcelis Technologies, Inc.
- Klaus Becker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM MEASUREMENT SYSTEMS AND METHODS FOR ION IMPLANT DOSE AND U...
- Publication number 20060033045
- Publication date Feb 16, 2006
- Klaus Petry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for the grounding of process wafers by the use...
- Publication number 20020167779
- Publication date Nov 14, 2002
- James C. Carroll
- H01 - BASIC ELECTRIC ELEMENTS

Klaus Petry

Person

Patents Grantslast 30 patents

System and method to monitor glitch energy

Semiconductor workpiece temperature measurement system

Semiconductor workpiece temperature measurement system

Electrostatic chuck with radiative heating

Current limiter for high voltage power supply used with ion implant...

FinFET device fabrication using thermal implantation

Platen clamping surface monitoring

Removal of charge between a substrate and an electrostatic clamp

Combination load lock for handling workpieces

Load lock control

Ion source for use in an ion implanter

Ion beam measurement systems and methods for ion implant dose and u...

Method and apparatus for the grounding of process wafers by the use...

Patents Applicationslast 30 patents

System And Method To Monitor Glitch Energy

Semiconductor Workpiece Temperature Measurement System

Semiconductor Workpiece Temperature Measurement System

ELECTROSTATIC CHUCK WITH RADIATIVE HEATING

Finfet Device Fabrication Using Thermal Implantation

PLATEN CLAMPING SURFACE MONITORING

CURRENT LIMITER FOR HIGH VOLTAGE POWER SUPPLY USED WITH ION IMPLANT...

REMOVAL OF CHARGE BETWEEN A SUBSTRATE AND AN ELECTROSTATIC CLAMP

Combination load lock for handling workpieces

Load lock control

ION SOURCE FOR USE IN AN ION IMPLANTER

ION BEAM MEASUREMENT SYSTEMS AND METHODS FOR ION IMPLANT DOSE AND U...

Method and apparatus for the grounding of process wafers by the use...