Klaus Reinhard Freischlad

Person

Tucson, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Front quartersphere scattered light analysis
- Patent number 10,018,572
- Issue date Jul 10, 2018
- KLA-Tencor Corporation
- Richard E. Bills
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Front quartersphere scattered light analysis
- Patent number 9,528,942
- Issue date Dec 27, 2016
- KLA-Tencor Corporation
- Richard E. Bills
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Front quartersphere scattered light analysis
- Patent number 9,488,591
- Issue date Nov 8, 2016
- Uster Technologies AG
- Richard E. Bills
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Front quartersphere scattered light analysis
- Patent number 9,110,033
- Issue date Aug 18, 2015
- KLA-Tencor Corporation
- Richard E. Bills
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer with a virtual reference surface
- Patent number 8,797,537
- Issue date Aug 5, 2014
- Zygo Corporation
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Grant
Back quartersphere scattered light analysis
- Patent number 8,330,947
- Issue date Dec 11, 2012
- KLA-Tencor Corporation
- Richard Earl Bills
- G01 - MEASURING TESTING
Information Patent Grant
System and method for inspecting a workpiece surface by analyzing s...
- Patent number 7,605,913
- Issue date Oct 20, 2009
- KLA-Tencor Corporation
- Richard Earl Bills
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for optically analyzing a surface
- Patent number 7,583,386
- Issue date Sep 1, 2009
- KLA-Tencor Corporation
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for optically analyzing a surface
- Patent number 7,428,056
- Issue date Sep 23, 2008
- KLA-Tencor Technologies Corporation
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for optically analyzing a surface
- Patent number 7,408,649
- Issue date Aug 5, 2008
- KLA-Tencor Technologies Corporation
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring the shape and thickness variatio...
- Patent number 6,847,458
- Issue date Jan 25, 2005
- Phase Shift Technology, Inc.
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for holding and transporting thin opaque plates
- Patent number 6,844,929
- Issue date Jan 18, 2005
- Phase Shift Technology
- Joe M. Glenn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for absolutely measuring flat and sperical sur...
- Patent number 6,184,994
- Issue date Feb 6, 2001
- ADE Phase Shift Technology
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer light source
- Patent number 6,061,133
- Issue date May 9, 2000
- Phase Shift Technology
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Grant
Extended-source low coherence interferometer for flatness testing
- Patent number 5,737,081
- Issue date Apr 7, 1998
- Phase Shift Technology, Inc.
- Klaus R. Freischlad
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Front Quartersphere Scattered Light Analysis
- Publication number 20170010222
- Publication date Jan 12, 2017
- KLA-Tencor Corporation
- Richard E. Bills
- G01 - MEASURING TESTING
Information Patent Application
Front Quartersphere Scattered Light Analysis
- Publication number 20150042993
- Publication date Feb 12, 2015
- KLA-Tencor Corporation
- Richard E. Bills
- G01 - MEASURING TESTING
Information Patent Application
Front Quartersphere Scattered Light Analysis
- Publication number 20150042987
- Publication date Feb 12, 2015
- KLA-Tencor Corporation
- Richard E. Bills
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETER WITH A VIRTUAL REFERENCE SURFACE
- Publication number 20120120411
- Publication date May 17, 2012
- Zygo Corporation
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Application
Front Quartersphere Scattered Light Analysis
- Publication number 20100110419
- Publication date May 6, 2010
- KLA-Tencor Corporation
- Richard Earl Bills
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for optically analyzing a surface
- Publication number 20070091317
- Publication date Apr 26, 2007
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for holding and transporting thin opaque plates
- Publication number 20040201843
- Publication date Oct 14, 2004
- Phase Shift Technology, Inc.
- Joe M. Glenn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for measuring the shape and thickness variatio...
- Publication number 20040184038
- Publication date Sep 23, 2004
- Phase Shift Technology, Inc.
- Klaus Freischlad
- G01 - MEASURING TESTING

Klaus Reinhard Freischlad

Person

Patents Grantslast 30 patents

Front quartersphere scattered light analysis

Front quartersphere scattered light analysis

Front quartersphere scattered light analysis

Front quartersphere scattered light analysis

Interferometer with a virtual reference surface

Back quartersphere scattered light analysis

System and method for inspecting a workpiece surface by analyzing s...

Method and apparatus for optically analyzing a surface

Method and apparatus for optically analyzing a surface

Method and apparatus for optically analyzing a surface

Method and apparatus for measuring the shape and thickness variatio...

Apparatus and method for holding and transporting thin opaque plates

Method and apparatus for absolutely measuring flat and sperical sur...

Interferometer light source

Extended-source low coherence interferometer for flatness testing

Patents Applicationslast 30 patents

Front Quartersphere Scattered Light Analysis

Front Quartersphere Scattered Light Analysis

Front Quartersphere Scattered Light Analysis

INTERFEROMETER WITH A VIRTUAL REFERENCE SURFACE

Front Quartersphere Scattered Light Analysis

Method and apparatus for optically analyzing a surface

Apparatus and method for holding and transporting thin opaque plates

Method and apparatus for measuring the shape and thickness variatio...