Klaus Rief

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Damping device
- Patent number 9,513,452
- Issue date Dec 6, 2016
- Carl Zeiss SMT GmbH
- Alexander Vogler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for moving an optical element of a projection exposure appar...
- Patent number 8,879,046
- Issue date Nov 4, 2014
- Carl Zeiss SMT GmbH
- Karl-Eugen Aubele
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 8,514,371
- Issue date Aug 20, 2013
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective for semiconductor lithography
- Patent number 8,199,315
- Issue date Jun 12, 2012
- Carl Zeiss SMT GmbH
- Klaus Rief
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,961,294
- Issue date Jun 14, 2011
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,710,542
- Issue date May 4, 2010
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Holding device for an optical element with support force equalization
- Patent number 7,609,464
- Issue date Oct 27, 2009
- Carl Zeiss SMT AG
- Klaus Rief
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,486,382
- Issue date Feb 3, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,304,717
- Issue date Dec 4, 2007
- Carl Zelss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20240111223
- Publication date Apr 4, 2024
- Carl Zeiss SMT GMBH
- Klaus Rief
- G02 - OPTICS
Information Patent Application
METHOD FOR MOVING AN OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPAR...
- Publication number 20140078487
- Publication date Mar 20, 2014
- Karl-Eugen Aubele
- G02 - OPTICS
Information Patent Application
OPTICAL DEVICES HAVING KINEMATIC COMPONENTS
- Publication number 20130038848
- Publication date Feb 14, 2013
- Carl Zeiss SMT GMBH
- Jochen Weber
- G02 - OPTICS
Information Patent Application
DAMPING DEVICE
- Publication number 20120138401
- Publication date Jun 7, 2012
- Carl Zeiss SMT GMBH
- Alexander Vogler
- G02 - OPTICS
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20110199597
- Publication date Aug 18, 2011
- Carl Zeiss SMT GMBH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD
- Publication number 20100128367
- Publication date May 27, 2010
- Carl Zeiss SMT AG
- Mariella Beckenbach
- G02 - OPTICS
Information Patent Application
Imaging Device in a Projection Exposure Machine
- Publication number 20090141258
- Publication date Jun 4, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20090040487
- Publication date Feb 12, 2009
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20080285002
- Publication date Nov 20, 2008
- Carl Zeiss SMT AG
- Klaus Rief
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE
- Publication number 20080174757
- Publication date Jul 24, 2008
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL DEVICES HAVING KINEMTAIC COMPONENTS
- Publication number 20080117397
- Publication date May 22, 2008
- Carl Zeiss SMT AG
- Jochen Weber
- G02 - OPTICS
Information Patent Application
HOLDING DEVICE FOR AN OPTICAL ELEMENT WITH SUPPORT FORCE EQUALIZATION
- Publication number 20080043349
- Publication date Feb 21, 2008
- Carl Zeiss SMT AG
- Klaus Rief
- G02 - OPTICS
Information Patent Application
Imaging device in a projection exposure machine
- Publication number 20060164619
- Publication date Jul 27, 2006
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging device in a projection exposure facility
- Publication number 20040263812
- Publication date Dec 30, 2004
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

Damping device

Method for moving an optical element of a projection exposure appar...

Imaging device in a projection exposure facility

Projection objective for semiconductor lithography

Imaging device in a projection exposure facility

Imaging device in a projection exposure machine

Holding device for an optical element with support force equalization

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility

Patents Applicationslast 30 patents

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY

METHOD FOR MOVING AN OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPAR...

OPTICAL DEVICES HAVING KINEMATIC COMPONENTS

DAMPING DEVICE

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD

Imaging Device in a Projection Exposure Machine

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

PROJECTION OBJECTIVE FOR SEMICONDUCTOR LITHOGRAPHY

IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE

OPTICAL DEVICES HAVING KINEMTAIC COMPONENTS

HOLDING DEVICE FOR AN OPTICAL ELEMENT WITH SUPPORT FORCE EQUALIZATION

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility