Klaus Rinn

Person

Heuchelheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for determining positions of structures on a mask
- Patent number 8,248,618
- Issue date Aug 21, 2012
- Vistec Semiconductor Systems GmbH
- Klaus Rinn
- G01 - MEASURING TESTING
Information Patent Grant
Coordinate measuring machine and method for calibrating the coordin...
- Patent number 8,115,808
- Issue date Feb 14, 2012
- Vistec Semiconductor Systems GmbH
- Wolfgang Fricke
- G01 - MEASURING TESTING
Information Patent Grant
Method for reproducibly determining geometrical and/or optical obje...
- Patent number 7,939,789
- Issue date May 10, 2011
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Device and method for determining an optical property of a mask
- Patent number 7,864,319
- Issue date Jan 4, 2011
- Vistec Semiconductor System GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Grant
Method for calibration of a measuring table of a coordinate measuri...
- Patent number 7,823,295
- Issue date Nov 2, 2010
- Vistec Semiconductor Systems GmbH
- Klaus Rinn
- G01 - MEASURING TESTING
Information Patent Grant
Method for eliminating sources of error in the system correction of...
- Patent number 7,694,426
- Issue date Apr 13, 2010
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Method for correcting an error of the imaging system of a coordinat...
- Patent number 7,680,616
- Issue date Mar 16, 2010
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Method for improving the reproducibility of a coordinate measuring...
- Patent number 7,654,007
- Issue date Feb 2, 2010
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Method for enhancing the measuring accuracy when determining the co...
- Patent number 7,548,321
- Issue date Jun 16, 2009
- Vistec Semiconductor Systems GmbH
- Klaus Rinn
- G01 - MEASURING TESTING
Information Patent Grant
Measuring instrument and method for operating a measuring instrumen...
- Patent number 7,420,670
- Issue date Sep 2, 2008
- Vistec Semiconductor Systems GmbH
- Klaus Rinn
- G02 - OPTICS
Information Patent Grant
Method and microscope for detection of a specimen
- Patent number 6,924,900
- Issue date Aug 2, 2005
- Leica Microsystems Semiconductor GmbH
- Klaus Rinn
- G01 - MEASURING TESTING
Information Patent Grant
Method and measuring instrument for determining the position of an...
- Patent number 6,920,249
- Issue date Jul 19, 2005
- Leica Microsystems Semiconductor GmbH
- Klaus Rinn
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and measuring arrangement for detecting an object
- Patent number 6,825,939
- Issue date Nov 30, 2004
- Leica Microsystems Semiconductor GmbH
- Klaus Rinn
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Interferometric measurement apparatus for wavelength calibration
- Patent number 6,816,263
- Issue date Nov 9, 2004
- Leica Microsystems Semiconductor GmbH
- Ulrich Kaczynski
- G01 - MEASURING TESTING
Information Patent Grant
Measuring instrument and method for measuring features on a substrate
- Patent number 6,559,458
- Issue date May 6, 2003
- Leica Microsystems Wetzlar GmbH
- Klaus Rinn
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining a position of a structural element on a subs...
- Patent number 6,549,648
- Issue date Apr 15, 2003
- Leica Microsystems Wetzlar GmbH
- Klaus Rinn
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for measuring structures on a transparent substrate
- Patent number 6,323,953
- Issue date Nov 27, 2001
- Leica Microsystems Wetzlar GmbH
- Carola Blaesing-Bangert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for correcting measurement errors in a machine measuring co-...
- Patent number 6,317,991
- Issue date Nov 20, 2001
- Leica Microsystems Wetzlar GmbH
- Klaus Rinn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for heterodyne interferometer error correction
- Patent number 6,008,902
- Issue date Dec 28, 1999
- Leica Microsystems Wetzlar GmbH
- Klaus Rinn
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method for Determining Positions of Structures on a Mask
- Publication number 20100220339
- Publication date Sep 2, 2010
- Vistec Semiconductor Systems GmbH
- Klaus Rinn
- G01 - MEASURING TESTING
Information Patent Application
Method for Calibration of a Measuring Table of a Coordinate Measuri...
- Publication number 20100205815
- Publication date Aug 19, 2010
- Vistec Semiconductor Systems GmbH
- Klaus Rinn
- G01 - MEASURING TESTING
Information Patent Application
MEANS AND METHOD FOR DETERMINING THE SPATIAL POSITION OF MOVING ELE...
- Publication number 20090073458
- Publication date Mar 19, 2009
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Device and method for determining an optical property of a mask
- Publication number 20090066955
- Publication date Mar 12, 2009
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETERMINING THE POSITION OF A MEASUREMENT OBJECTIVE IN T...
- Publication number 20090051932
- Publication date Feb 26, 2009
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Method for reproducibly determining object characteristics
- Publication number 20090045318
- Publication date Feb 19, 2009
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Method for correcting an error of the imaging system of a coordinat...
- Publication number 20090024344
- Publication date Jan 22, 2009
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Coordinate measuring machine and method for calibrating the coordin...
- Publication number 20090002486
- Publication date Jan 1, 2009
- Vistec Semiconductor Systems GmbH
- Wolfgang Fricke
- G01 - MEASURING TESTING
Information Patent Application
Method for improving the reproducibility of a coordinate measuring...
- Publication number 20080295348
- Publication date Dec 4, 2008
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR ELIMINATING SOURCES OF ERROR IN THE SYSTEM CORRECTION OF...
- Publication number 20080201971
- Publication date Aug 28, 2008
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Method for enhancing the measuring accuracy when determining the co...
- Publication number 20070268495
- Publication date Nov 22, 2007
- Vistec Semiconductor Systems GmbH
- Klaus Rinn
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE SUPPORT APPARATUS FOR USE IN A POSITION MEASURING DEVICE
- Publication number 20070103667
- Publication date May 10, 2007
- Vistec Semiconductor Systems GmbH
- Michael Ferber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measuring instrument and method for operating a measuring instrumen...
- Publication number 20050254068
- Publication date Nov 17, 2005
- Leica Microsystems Semiconductor GmbH
- Klaus Rinn
- G02 - OPTICS
Information Patent Application
Interferometric measurement apparatus for wavelength calibration
- Publication number 20030025910
- Publication date Feb 6, 2003
- Ulrich Kaczynski
- G01 - MEASURING TESTING
Information Patent Application
Method and microscope for detection of a specimen
- Publication number 20030025992
- Publication date Feb 6, 2003
- Klaus Rinn
- G01 - MEASURING TESTING
Information Patent Application
Method and measuring arrangement for detecting an object
- Publication number 20030011762
- Publication date Jan 16, 2003
- Leica Microsystems Wetzlar GmbH.
- Klaus Rinn
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for reading out a detection chip of an electronic camera
- Publication number 20020196331
- Publication date Dec 26, 2002
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Klaus Rinn
- G01 - MEASURING TESTING
Information Patent Application
Method and measuring instrument for determining the position of an...
- Publication number 20020057839
- Publication date May 16, 2002
- Klaus Rinn
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Measuring instrument and method for measuring features on a substrate
- Publication number 20010008272
- Publication date Jul 19, 2001
- Klaus Rinn
- B82 - NANO-TECHNOLOGY

Person

Patents Grantslast 30 patents

Method for determining positions of structures on a mask

Coordinate measuring machine and method for calibrating the coordin...

Method for reproducibly determining geometrical and/or optical obje...

Device and method for determining an optical property of a mask

Method for calibration of a measuring table of a coordinate measuri...

Method for eliminating sources of error in the system correction of...

Method for correcting an error of the imaging system of a coordinat...

Method for improving the reproducibility of a coordinate measuring...

Method for enhancing the measuring accuracy when determining the co...

Measuring instrument and method for operating a measuring instrumen...

Method and microscope for detection of a specimen

Method and measuring instrument for determining the position of an...

Method and measuring arrangement for detecting an object

Interferometric measurement apparatus for wavelength calibration

Measuring instrument and method for measuring features on a substrate

Method for determining a position of a structural element on a subs...

Method and device for measuring structures on a transparent substrate

Method for correcting measurement errors in a machine measuring co-...

Method and device for heterodyne interferometer error correction

Patents Applicationslast 30 patents

Method for Determining Positions of Structures on a Mask

Method for Calibration of a Measuring Table of a Coordinate Measuri...

MEANS AND METHOD FOR DETERMINING THE SPATIAL POSITION OF MOVING ELE...

Device and method for determining an optical property of a mask

METHOD FOR DETERMINING THE POSITION OF A MEASUREMENT OBJECTIVE IN T...

Method for reproducibly determining object characteristics

Method for correcting an error of the imaging system of a coordinat...

Coordinate measuring machine and method for calibrating the coordin...

Method for improving the reproducibility of a coordinate measuring...

METHOD FOR ELIMINATING SOURCES OF ERROR IN THE SYSTEM CORRECTION OF...

Method for enhancing the measuring accuracy when determining the co...

SUBSTRATE SUPPORT APPARATUS FOR USE IN A POSITION MEASURING DEVICE

Measuring instrument and method for operating a measuring instrumen...

Interferometric measurement apparatus for wavelength calibration

Method and microscope for detection of a specimen

Method and measuring arrangement for detecting an object

Method for reading out a detection chip of an electronic camera

Method and measuring instrument for determining the position of an...

Measuring instrument and method for measuring features on a substrate