Klaus Roithner

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Spatially uniform gas supply and pump configuration for large wafer...
- Patent number 6,537,418
- Issue date Mar 25, 2003
- Siemens Aktiengesellschaft
- K. Paul Muller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication of trench capacitors using disposable hard mask
- Patent number 6,190,955
- Issue date Feb 20, 2001
- International Business Machines Corporation
- Matthias Ilg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for preventing formation of black silicon on e...
- Patent number 6,066,570
- Issue date May 23, 2000
- Siemens Aktiengesellschaft
- Dung-Ching Perng
- H01 - BASIC ELECTRIC ELEMENTS