Klaus Roithner

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Wappingers Falls, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Distribution plate for a reaction chamber with multiple gas inlets...
- Patent number 6,294,026
- Issue date Sep 25, 2001
- Siemens Aktiengesellschaft
- Klaus Roithner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Distribution plate for a reaction chamber with multiple gas inlets...
- Patent number 5,961,723
- Issue date Oct 5, 1999
- Siemens Aktiengesellschaft
- Klaus Roithner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pad stack with a poly SI etch stop for TEOS mask removal with RIE
- Patent number 5,776,808
- Issue date Jul 7, 1998
- Siemens Aktiengesellschaft
- Karl Paul Muller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch profile shaping through wafer temperature control
- Patent number 5,605,600
- Issue date Feb 25, 1997
- International Business Machines Corporation
- Karl P. Muller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced deep trench storage node capacitance for DRAM
- Patent number 5,592,412
- Issue date Jan 7, 1997
- Siemens Aktiengesellschaft
- Richard Kleinhenz
- H01 - BASIC ELECTRIC ELEMENTS