Klaus Schiessel

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Vienna, AT

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Patents Grantslast 30 patents

Information Patent Grant
Compensation of defective beamlets in a charged-particle multi-beam...
- Patent number 9,269,543
- Issue date Feb 23, 2016
- IMS Nanofabrication AG
- Rafael Reiter
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COMPENSATION OF DEFECTIVE BEAMLETS IN A CHARGED-PARTICLE MULTI-BEAM...
- Publication number 20150248993
- Publication date Sep 3, 2015
- IMS Nanofabrication AG
- Rafael Reiter
- H01 - BASIC ELECTRIC ELEMENTS