Klaus Schiessl

Follow

Person

Wien, AT

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-beam writing of pattern areas of relaxed critical dimension
- Patent number 9,653,263
- Issue date May 16, 2017
- IMS Nanofabrication AG
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Multi-Beam Writing of Pattern Areas of Relaxed Critical Dimension
- Publication number 20160276132
- Publication date Sep 22, 2016
- IMS Nanofabrication AG
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS