Klaus Schimmanz

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Cottbus, DE

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Patents Grantslast 30 patents

Information Patent Grant
MEMS and method of manufacturing the same
- Patent number 11,186,478
- Issue date Nov 30, 2021
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Sergiu Langa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer for interacting with a volume flow of a fluid and m...
- Patent number 10,457,544
- Issue date Oct 29, 2019
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Harald Schenk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device with an actively deflectable element
- Patent number 9,676,607
- Issue date Jun 13, 2017
- Fraunhofer Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Matthieu Gaudet
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS AND METHOD OF MANUFACTURING THE SAME
- Publication number 20190382257
- Publication date Dec 19, 2019
- Sergiu LANGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID AND M...
- Publication number 20180179048
- Publication date Jun 28, 2018
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Harald SCHENK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DEVICE WITH AN ACTIVELY DEFLECTABLE ELEMENT
- Publication number 20160304333
- Publication date Oct 20, 2016
- Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
- Matthieu Gaudet
- B81 - MICRO-STRUCTURAL TECHNOLOGY