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Knut Beekman
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Bristol, GB
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Patents Grants
last 30 patents
Information
Patent Grant
Methods of forming nitride films
Patent number
6,929,831
Issue date
Aug 16, 2005
Trikon Holdings Limited
Jashu Patel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing a layer
Patent number
6,905,962
Issue date
Jun 14, 2005
Trikon Technologies Limited
Knut Beekman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and depositing a layer
Patent number
6,831,010
Issue date
Dec 14, 2004
Trikon Technologies Limited
Knut Beekman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for forming a film on a substrate
Patent number
6,627,535
Issue date
Sep 30, 2003
Trikon Holdings Ltd.
John MacNeil
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for treating silicon-containing polymer layers with plasma o...
Patent number
6,544,858
Issue date
Apr 8, 2003
Trikon Equipments Limited
Knut Beekman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for treating a semiconductor substrate
Patent number
6,242,366
Issue date
Jun 5, 2001
Trikon Equipments Limited
Knut Beekman
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR TREATING A SEMI-CONDUCTOR SUBSTRATE
Publication number
20090170343
Publication date
Jul 2, 2009
AVIZA TECHNOLOGY LIMITED
Knut Beekman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of depositing a layer
Publication number
20040058529
Publication date
Mar 25, 2004
Knut Beekman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods and apparatus for forming a film on a substrate
Publication number
20040056356
Publication date
Mar 25, 2004
John MacNeil
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of filling trenches
Publication number
20030157781
Publication date
Aug 21, 2003
John Macneil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods of forming nitride films
Publication number
20030118872
Publication date
Jun 26, 2003
Jashu Patel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and depositing a layer
Publication number
20020132460
Publication date
Sep 19, 2002
Knut Beekman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods and apparatus for forming a film on s substrate
Publication number
20010030369
Publication date
Oct 18, 2001
John MacNeil
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...