Knut Beekmann

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Yatton, GB

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for treating a semi-conductor substrate
- Patent number 7,923,383
- Issue date Apr 12, 2011
- Tokyo Electron Limited
- Knut Beekmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for treating a semi-conductor substrate
- Publication number 20040043631
- Publication date Mar 4, 2004
- Knut Beekmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...