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Hitachiota, JP
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last 30 patents
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Patent Grant
Apparatus and method of ion beam processing
Patent number
6,610,987
Issue date
Aug 26, 2003
Hitachi, Ltd.
Yoshihiro Kimura
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Apparatus and method of ion beam processing
Publication number
20020175296
Publication date
Nov 28, 2002
Yoshihiro Kimura
H01 - BASIC ELECTRIC ELEMENTS