Koei Aida

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Gas supply unit and substrate processing apparatus including gas su...
- Patent number 12,051,567
- Issue date Jul 30, 2024
- ASM IP Holding B.V.
- Koei Aida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shower plate having different aperture dimensions and/or distributions
- Patent number 8,845,806
- Issue date Sep 30, 2014
- ASM Japan K.K.
- Koei Aida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SHARED EXHAUST UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING SH...
- Publication number 20240258085
- Publication date Aug 1, 2024
- ASM IP HOLDING B.V.
- Koei Aida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER LINER FOR SUBSTRATE PROCESSING APPARATUS
- Publication number 20240150898
- Publication date May 9, 2024
- ASM IP HOLDING B.V.
- Yoshiyuki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID-SOURCE PRECURSOR DELIVERY SYSTEM APPARATUS AND METHOD OF USI...
- Publication number 20240117492
- Publication date Apr 11, 2024
- ASM IP HOLDING B.V.
- Koei Aida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER SUPPORT DEVICE AND FILM FORMING APPARATUS
- Publication number 20230360953
- Publication date Nov 9, 2023
- ASM IP HOLDING B.V.
- Koei Aida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR SELECTIVELY REMOVING MATERIAL AT AN EDGE OF A...
- Publication number 20230137026
- Publication date May 4, 2023
- ASM IP HOLDING B.V.
- Yoshio Susa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CVD APPARATUS AND FILM FORMING METHOD
- Publication number 20220367151
- Publication date Nov 17, 2022
- ASM IP HOLDING B.V.
- Koei Aida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING GAS SU...
- Publication number 20220108876
- Publication date Apr 7, 2022
- ASM IP HOLDING B.V.
- Koei Aida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shower Plate Having Different Aperture Dimensions and/or Distributions
- Publication number 20120100307
- Publication date Apr 26, 2012
- ASM JAPAN K.K.
- Koei Aida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER LIFT PINS SUSPENDED AND SUPPORTED AT UNDERSIDE OF SUSCEPTOR
- Publication number 20100101491
- Publication date Apr 29, 2010
- ASM JAPAN K.K.
- Koei Aida
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Gas supply unit and substrate processing apparatus including gas su...

Shower plate having different aperture dimensions and/or distributions

Patents Applicationslast 30 patents

SHARED EXHAUST UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING SH...

CHAMBER LINER FOR SUBSTRATE PROCESSING APPARATUS

LIQUID-SOURCE PRECURSOR DELIVERY SYSTEM APPARATUS AND METHOD OF USI...

WAFER SUPPORT DEVICE AND FILM FORMING APPARATUS

METHOD AND SYSTEM FOR SELECTIVELY REMOVING MATERIAL AT AN EDGE OF A...

CVD APPARATUS AND FILM FORMING METHOD

GAS SUPPLY UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING GAS SU...

Shower Plate Having Different Aperture Dimensions and/or Distributions

WAFER LIFT PINS SUSPENDED AND SUPPORTED AT UNDERSIDE OF SUSCEPTOR