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Lommel, BE
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Patents Grants
last 30 patents
Information
Patent Grant
Fluid handling structure for lithographic apparatus
Patent number
11,860,546
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Pepijn Van Den Eijnden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure for lithographic apparatus
Patent number
11,454,892
Issue date
Sep 27, 2022
ASML Netherlands B.V.
Pepijn Van Den Eijnden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pressure control valve, a fluid handling structure for lithographic...
Patent number
11,199,771
Issue date
Dec 14, 2021
ASML Netherlands B.V.
Stef Marten Johan Janssens
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Fluid handling structure for lithographic apparatus
Patent number
11,029,607
Issue date
Jun 8, 2021
ASML Netherlands B.V.
Pepijn Van Den Eijnden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gas flow optimization in reticle stage environment
Patent number
10,031,428
Issue date
Jul 24, 2018
ASML Netherlands B.V.
Koen Cuypers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,939,740
Issue date
Apr 10, 2018
ASML Netherlands B.V.
Günes Nakiboglu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,013,673
Issue date
Apr 21, 2015
ASML Netherlands B.V.
Jeroen Gerard Gosen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a device manufacturing method
Patent number
8,755,026
Issue date
Jun 17, 2014
ASML Netherlands B.V.
Jeroen Gerard Gosen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
Publication number
20230053840
Publication date
Feb 23, 2023
ASML NETHERLANDS B.V.
Pepijn VAN DEN EIJNDEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PRESSURE CONTROL VALVE, A FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC...
Publication number
20220075264
Publication date
Mar 10, 2022
ASML NETHERLANDS B.V.
Stef Marten Johan JANSSENS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
Publication number
20210263424
Publication date
Aug 26, 2021
ASML NETHERLANDS B.V.
Pepijn VAN DEN EIJNDEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20210096471
Publication date
Apr 1, 2021
ASML NETHERLANDS B.V.
Erik Henricus Egidius Catharina EUMMELEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
Publication number
20200409270
Publication date
Dec 31, 2020
ASML NETHERLANDS B.V.
Pepijn VAN DEN EIJNDEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A PRESSURE CONTROL VALVE, A FLUID HANDLING STRUCTURE FOR LITHOGRAPH...
Publication number
20200041895
Publication date
Feb 6, 2020
ASML NETHERLANDS B.V.
Stef Marten Johan JANSSENS
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160349631
Publication date
Dec 1, 2016
ASML NETHERLANDS B.V.
Günes NAKIBOGLU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Gas Flow Optimization in Reticle Stage Environment
Publication number
20150355557
Publication date
Dec 10, 2015
ASML NETHERLANDS B.V.
Koen CUYPERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
Publication number
20110149258
Publication date
Jun 23, 2011
ASML NETHERLANDS B.V.
Jeroen Gerard Gosen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110129782
Publication date
Jun 2, 2011
ASML NETHERLANDS B.V.
Jeroen Gerard GOSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY